Micro Flow Control Valve with Stable Condition Using Particle-Excitation

Abstract

This paper proposes a drive principle that aims to improve the control characteristics of a particle-excitation flow control valve capable of continuous air flow control. Aiming at application to a small servo valve, the authors have developed a particle-excitation flow control valve that controls flow rate by separating particles, which act as a valve element, from an orifice that is opened by the oscillation of a piezoelectric element. This paper proposes a method of more finely adjusting the motion of the particles. This method makes it possible to adjust to what degree each orifice opens, thereby refining the control of the flow rate and improving the responsiveness of the valve. Here, the authors produce a prototype, evaluate its characteristics, and confirm its effectiveness.