Micro-fabrication of the non-moving part valve micro-pump by hot-embossing technology

Pun, Ashley M. H.; Lo, Jason Hok-chun; Louie, Derek C. H.; Li, Liman

doi:10.1007/978-3-540-36841-0_69

Cited by 5 publications

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Advances in Valveless Piezoelectric Pump with Cone-shaped Tubes

Zhang

Wang

Huang

2017

Chin. J. Mech. Eng.

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This paper reviews the development of valveless piezoelectric pump with cone-shaped tube chronologically, which have widely potential application in biomedicine and micro-electro-mechanical systems because of its novel principles and deduces the research direction in the future. Firstly, the history of valveless piezoelectric pumps with cone-shaped tubes is reviewed and these pumps are classified into the following types: single pump with solid structure or plane structure, and combined pump with parallel structure or series structure. Furthermore, the function of each type of cone-shaped tubes and pump structures are analyzed, and new directions of potential expansion of valveless piezoelectric pumps with cone-shaped tubes are summarized and deduced. The historical argument, which is provided by the literatures, that for a valveless piezoelectric pump with cone-shaped tubes, cone angle determines the flow resistance and the flow resistance determines the flow direction. The argument is discussed in the reviewed pumps one by one, and proved to be convincing. Finally, it is deduced that bionics is pivotal in the development of valveless piezoelectric pump with cone-shaped tubes from the perspective of evolution of biological structure. This paper summarizes the current valveless piezoelectric pumps with cone-shaped tubes and points out the future development, which may provide guidance for the research of piezoelectric actuators.

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