Microelectromechanical Systems 2002
DOI: 10.1115/imece2002-39309
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Micro-Electrostatic Vibration-to-Electricity Converters

Abstract: Advances in low power VLSI design, along with the potentially low duty cycle of wireless sensor nodes open up the possibility of powering small wireless computing devices from scavenged ambient power. Low level vibrations occurring in typical household, office, and manufacturing environments are considered as a possible power source for wireless sensor nodes. This work focuses on the design of electrostatic vibration-to-electricity converters using MEMS fabrications technology. Detailed models of three differe… Show more

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Cited by 227 publications
(167 citation statements)
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“…In order to have an efficient photovoltaic cell, the light direction must be direct and perpendicular to the surface of the cell. Without a direct and high intensity light, the generating capacity of the cell can decrease drastically from 15mW/cm 2 in direct sunlight to 10µW/cm 2 in normal office lighting [46].…”
Section: Photovoltaic Generationmentioning
confidence: 99%
“…In order to have an efficient photovoltaic cell, the light direction must be direct and perpendicular to the surface of the cell. Without a direct and high intensity light, the generating capacity of the cell can decrease drastically from 15mW/cm 2 in direct sunlight to 10µW/cm 2 in normal office lighting [46].…”
Section: Photovoltaic Generationmentioning
confidence: 99%
“…The out-of-plane gap closing structure uses two plates that one of them is fixed and the other one is movable as shown in Figure 3 [9]. …”
Section: Figure 2simple Circuit Representation For Electrostatic Convmentioning
confidence: 99%
“…The mass is damped by two forces, the mechanical damping ( ) and electrically induced damping ( ) that stand for the energy removed from the mechanical subsystem and stored in the electrical subsystem [9].…”
Section: Figure 1mechanical Schematic Of Mems Structurementioning
confidence: 99%
“…These are piezoelectric, 1 electromagnetic, 2 and electrostatic. 3 The comparison between maximum energy densities of these three transducers is given in Table 1. 4 In the present study, piezoelectric materials have been used because they have relatively simple configurations and a high conversion efficiency.…”
Section: Introductionmentioning
confidence: 99%