“…According to the different sensing mechanisms, MEMS tilt sensors can be divided into resonant sensing [4], capacitive sensing [5], impedance sensing [6], mode-localized sensing [7][8], etc. The mode localization effect has already been widely used in acceleration sensing [9][10][11], tilt sensing [7][8], mass sensing [12][13], and charge sensing [14][15] in recent years. Compared with the traditional frequency output, the amplitude ratio output has a significant improvement in sensitivity and shows common mode rejection to the environment [16].…”