Micro-Electromechanical Systems-based Sensors and Their Applications

Nazir, Sophia; Kwon, Oh Seok

doi:10.5757/asct.2022.31.2.40

Cited by 22 publications

(13 citation statements)

References 42 publications

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“…In addition, a field‐effect transistor (FET) of the biosensor platform was fabricated by using a microelectromechanical systems (MEMS), and many energies, such as the thermal energy, vacuum energy, physical energy, and sound energy, were required for the MEMS process. Therefore, the introduction of OICs onto the graphene surface progressed after the MEMS process ended [8–13] . The conjugation efficiency of OIC interfacial compounds onto graphene and the introduction efficiency of the bioprobe are limited owing to steric hinderance or the amount of the activated functional group [14] .…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the introduction of OICs onto the graphene surface progressed after the MEMS process ended. [8][9][10][11][12][13] The conjugation efficiency of OIC interfacial compounds onto graphene and the introduction efficiency of the bioprobe are limited owing to steric hinderance or the amount of the activated functional group. [14] Therefore, OICs are required to have self-assembly, highly stable interactions, and high immobilization efficiency, and the preparation of covalent bond-based OICs is still challenging due to the need for molecular design with terminal functional groups and new patterning technologies.…”

Section: Introductionmentioning

confidence: 99%

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Open‐Bandgap Graphene‐Based Field‐Effect Transistor Using Oligo(phenylene‐ethynylene) Interfacial Chemistry

et al. 2022

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Organic interfacial compounds (OICs) are required as linkers for the highly stable and efficient immobilization of bioprobes in nanobiosensors using 2D nanomaterials such as graphene. Herein, we first demonstrated the fabrication of a field-effect transistor (FET) via a microelectromechanical system process after covalent functionalization on large-scale graphene by introducing oligo(phenylene-ethynylene)amine (OPE). OPE was compared to various OICs by density functional theory simulations and was confirmed to have a higher binding energy with graphene and a lower band gap than other OICs. OPE can improve the immobilization efficiency of a bioprobe by forming a self-assembly monolayer via anion-based reaction. Using this technology, Magainin I-conjugated OGMFET (MOGMFET) showed a high sensitivity, high selectivity, with a limit of detection of 10 0 cfu mL À 1 . These results indicate that the OPE OIC can be applied for stable and comfortable interfacing technology for biosensor fabrication.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Open‐Bandgap Graphene‐Based Field‐Effect Transistor Using Oligo(phenylene‐ethynylene) Interfacial Chemistry

et al. 2022

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“…After the fabrication of monolayer graphene, graphene electrodes were manufactured by a conventional MEMS processing system. , First, a photoresist (AZ5214E) with a spin coater (ACE-200) was used for the treatment of pristine graphene, and an aligner (MA-6 III, Karl-suss) was used for its fabrication. For the fabrication of GM, the reactive-ion etching (RIE) process was employed.…”

Section: Methodsmentioning

confidence: 99%

Discrimination of the H1N1 and H5N2 Variants of Influenza A Virus Using an Isomeric Sialic Acid-Conjugated Graphene Field-Effect Transistor

Nazir

Kim

et al. 2023

Anal. Chem.

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There has been a continuous effort to fabricate a fast, sensitive, and inexpensive system for influenza virus detection to meet the demand for effective screening in point-of-care testing. Herein, we report a sialic acid (SA)-conjugated graphene field-effect transistor (SA-GFET) sensor designed using α2,3-linked sialic acid (3′-SA) and α2,6-linked sialic acid (6′-SA) for the detection and discrimination of the hemagglutinin (HA) protein of the H5N2 and H1N1 viruses. 3′-SA and 6′-SA specific for H5 and H1 influenza were used in the SA-GFET to capture the HA protein of the influenza virus. The net charge of the captured viral sample led to a change in the electrical current of the SA-GFET platform, which could be correlated to the concentration of the viral sample. This SA-GFET platform exhibited a highly sensitive response in the range of 101–106 pfu mL–1, with a limit of detection (LOD) of 101 pfu mL–1 in buffer solution and a response time of approximately 10 s. The selectivity of the SA-GFET platform for the H1N1 and H5N2 influenza viruses was verified by testing analogous respiratory viruses, i.e., influenza B and the spike protein of SARS-CoV-2 and MERS-CoV, on the SA-GFET. Overall, the results demonstrate that the developed dual-channel SA-GFET platform can potentially serve as a highly efficient and sensitive sensing platform for the rapid detection of infectious diseases.

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“…The electrodes for the SAb-GMFET were fabricated by a microelectromechanical system (MEMS) process [16,17]. AZ GNX-601 positive photoresist was utilized with GM in the photolithography process, and a reactive-ion etching system was used for graphene etching.…”

Section: Fabrication Of Sab-gmfetmentioning

confidence: 99%

A Portable Graphene Micropatterned Field-Effect Transistor Device for Rapid Real-Time Monitoring of Serotonin

Kim

Seo

Kwon

2022

Appl. Sci. Converg. Technol.

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Serotonin is a stress biomarker and is one of the major neurotransmitters, and its concentration in the body is related to psychological functions such as mental illness. In particular, this biomarker is used to indicate depression caused by the increased stress of modern society. Therefore, detection and monitoring technologies are important for tracing concentration changes. In this study, we developed a serotonin antibodyconjugated graphene micropatterned field-effect transistor (SAb-GMFET)-based portable device for on-site or self-diagnosis of serotonin. The SAb-GMFET consisted of a graphene micropatterned channel, SAb for selective detection, and electrodes to supply the voltage. The SAb was immobilized by forming an amide bond with a diamine linker. SAb-GFMET showed high performance of limit of detection of 10 pM within 10 s and exhibited excellent selective detection among the interfering materials. For on-site and self-diagnosis applications, a portable device was developed with a sim chip, and the SAb-GMFET was connected to a printed circuit board using wire bonding. The portable SAb-GMFET showed a similar performance to that of the SAb-GMFET. Therefore, this portable platform can be utilized for point-of-care tests.

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Micro-Electromechanical Systems-based Sensors and Their Applications

Cited by 22 publications

References 42 publications

Open‐Bandgap Graphene‐Based Field‐Effect Transistor Using Oligo(phenylene‐ethynylene) Interfacial Chemistry

Open‐Bandgap Graphene‐Based Field‐Effect Transistor Using Oligo(phenylene‐ethynylene) Interfacial Chemistry

Discrimination of the H1N1 and H5N2 Variants of Influenza A Virus Using an Isomeric Sialic Acid-Conjugated Graphene Field-Effect Transistor

A Portable Graphene Micropatterned Field-Effect Transistor Device for Rapid Real-Time Monitoring of Serotonin

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