Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid

Kim, B.H.; Na, C.W.; Lee, Y.S.; Choi, Duck K.; Chu, Chong Nam

doi:10.1016/s0007-8506(07)60081-x

Cited by 170 publications

(65 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…6, which characterize spherical diffusion Fig. 11 Examples of ns-PECM wire cutting application [13] Fig. 12 Example of ns-PECM milling application: a structure for microfluidics (material: 1.4441 steel) (ECMTEC GmbH Holzgerlingen, Germany) (Fig.…”

Section: Limits Of Ns-pecm Accuracymentioning

confidence: 99%

“…The workpiece in ns-PECM can be shaped with different typical for ECM kinematics variants as sinking or hole drilling [1,10,12,14,32,34,49], machining with universal electrode tool [13,15,28,50] or in kinematic analogous to wire cutting [41,46,51,53]. Selected examples of application were presented in Figs.…”

Section: Perspectives An Limitations Of Ns-pecm Industrial Applicationmentioning

confidence: 99%

See 1 more Smart Citation

Discussion of ultrashort voltage pulses electrochemical micromachining: a review

Skoczypiec

2016

Int J Adv Manuf Technol

View full text Add to dashboard Cite

One of the most effective way of electrochemical machining (ECM) accuracy increase is to carry out process with application of voltage pulses. In one of the variants of ECM, ultra short (nono-or picosecond range) voltage pulses are applied. It gives possibility to achieve high localization of electrochemical dissolution process and allows to machine microparts with accuracy less than 0.01 mm. However, because of the process principles, this variant of ECM has number of limitations which stop its wider application in micromanufacturing industry. Based on the literature review, the physical principles of ultrashort voltage pulses electrochemical machining were presented and anodic dissolution localization issues were discussed. Also, differences between other electrochemical machining variants were underlined. It gave possibility to identify limitations and future perspectives of industrial applications.

show abstract

Section: Limits Of Ns-pecm Accuracymentioning

confidence: 99%

Section: Perspectives An Limitations Of Ns-pecm Industrial Applicationmentioning

confidence: 99%

Discussion of ultrashort voltage pulses electrochemical micromachining: a review

Skoczypiec

2016

Int J Adv Manuf Technol

View full text Add to dashboard Cite

show abstract

“…Take the straight line for example, A group of codes (10,20,30) represents the coordinates of starting point (X1, Y1, Z1), a group of code (11, 21, 31) il-lustrates the coordinates of end point (X2, Y2, Z2). For the arc, a group of codes (10,20,30) represents the coordinates of circle center (X0, Y0, Z0), code 40 is the arc of the radius, and the codes (50, 51) represent the arc starting angle and the end angle, respectively. Based on above, we designed a program interface for reading DXF data file by using C programming language, the program flow is shown in Fig.…”

Section: Tool Path Servo Feed Algorithmmentioning

confidence: 99%

“…Many studies have attempted electrochemical micromachining. German scientists Rolf Schuster et al fabricated a micro cavity with several ten micrometers [7], United States scientists Trimmer et al processed a complex patterns with the structural size of sub-microns [8], South Korea's Kim et al worked out three-dimensional micro structures with good surface roughness [9,10]. Kurita in Japan using electrochemical micromachining technology processed out of the micro-prismatic electrode a complex micro structure [11], B. Bhattacharyya in India machined the micro holes and the ushaped slot structures successfully [12].…”

Section: Introductionmentioning

confidence: 99%

Development of Manufacturing Control and Data Acquisition System for Micro Electrochemical Milling Process

Liu¹,

Zhang²,

Cai³

2015

TOAUTOCJ

View full text Add to dashboard Cite

Abstract:In order to realize real-time control and detection of the three-dimensional micro-electrochemical milling process, a data acquisition and control system is established based on virtual instrument software LabWindows/CVI. The three-dimensional tool path optimization, tool path servo feed algorithm, the data acquisition and anti-jamming algorithm are investigated. First, according to the characteristics of micro-electrochemical milling process, this paper analyzes the requirements of the control and detection system in depth. After that, a high-precision experimental system for 3D microelectrochemical milling is established. Then, the optimization of tool path and the data acquisition and its feedback control module are discussed as follows. Finally, experiments are carried out and a three-step staircase structure is fabricated successfully. It shows that the system can meet the requirements of micro-electrochemical milling process.

show abstract

“…Micro-WECM enables the fabrication of precise features on a thin workpiece, such as a microhelix, a microgear, and a microchannel. Typically, the thickness of workpiece cut by Micro-WECM is less than 100 m [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Analysis and Reduction of Stray-Current Attack in Reciprocated Traveling Wire Electrochemical Machining

Zeng

Fang

et al. 2014

Advances in Mechanical Engineering

View full text Add to dashboard Cite

Traveling wire electrochemical machining is a promising approach for the fabrication of various metal parts. However, the straycurrent attack deteriorates the surface quality while it is employed to cut thick workpiece as a normal pulse or DC is used. In this paper, the characteristics of the stray-current attack in reciprocated traveling wire electrochemical machining are firstly identified, and special insulating methods are proposed to reduce the effect of the stray-current. The model of electric field is built. Both the simulation and the experimental results illustrate that the stray-current attack can be reduced significantly by the proposed insulating methods. Finally, structures with fine surface quality on stainless steel 304 with thickness of 20 mm were successfully produced.

show abstract

Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid

Cited by 170 publications

References 5 publications

Discussion of ultrashort voltage pulses electrochemical micromachining: a review

Discussion of ultrashort voltage pulses electrochemical micromachining: a review

Development of Manufacturing Control and Data Acquisition System for Micro Electrochemical Milling Process

Analysis and Reduction of Stray-Current Attack in Reciprocated Traveling Wire Electrochemical Machining

Contact Info

Product

Resources

About