Micro-electro-mechanical-systems direct fluid shear stress sensor arrays for flow control

Hunt, Simon A.; Rudge, Andy; Carey, Mark William; Parfitt, M; Chase, J. Geoffrey; Huntsman, I.

doi:10.1088/0964-1726/11/4/401

Cited by 8 publications

(3 citation statements)

References 5 publications

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“…Additionally, some piezoelectric materials can be miniaturized to produce films or nano-wires for further applications. These films are important components of both actuators and sensors in MEMS and micro-optical devices such as micropumps, atomic force microscopes (AFM), ultrasonic micromotors [ 1 ], infrared (IR) detector arrays [ 2 ], micromixers [ 3 ], micromirrors, microrelaies [ 4 ], pressure microsensors [ 5 , 6 ] and stress microsensors [ 7 ]. The applications of piezoelectric films are myriad.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of PZT Thick Films for Sensing and Actuation

Jang

Kuo

2007

Sensors

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Lead Zirconate Titanate oxide (PZT) thick films with thicknesses of up to 10 µm were developed using a modified sol-gel technique. Usually, the film thickness is less than 1 µm by conventional sol-gel processing, while the electrical charge accumulation which reveals the direct effect of piezoelectricity is proportional to the film thickness and therefore restricted. Two approaches were adopted to conventional sol-gel processing -precursor concentration modulation and rapid thermal annealing. A 10 µm thick film was successfully fabricated by coating 16 times via this technique. The thickness of each coating layer was about 0.6 µm and the morphology of the film was dense with a crack-free area as large as 16 mm 2 . In addition, the structure, surface morphology and physical properties were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) and electrical performance. The dielectric constant and hysteresis loops were measured as electric characteristics. This study investigates the actuation and sensing performance of the vibrating structures with the piezoelectric thick film. The actuation tests demonstrated that a 4 mm x 4 mm x 6.5 µm PZT film drove a 40 mm x 7 mm x 0.5 mm silicon beam as an actuator. Additionally, it generated an electrical signal of 60 mV pp as a sensor, while vibration was input by a shaker. The frequencies of the first two modes of the beam were compared with the theoretical values obtained by Euler-Bernoulli beam theory. The linearity of the actuation and sensing tests were also examined.

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Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of PZT Thick Films for Sensing and Actuation

Jang

Kuo

2007

Sensors

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“…Flow control is currently increase attention in connection with a variety of applications. In flow control application one may want to destabilize the flow, in order to achieve better mixing, or to stabilize the flow in order to eliminate undesirable unsteady loads [1]. Therefore, the accurately measurement of the flow parameter is very important.…”

Section: Introductionmentioning

confidence: 99%

The fabrication and integration of a novel shear stress sensor array and its wind tunnel test

Liu

Yuan

et al. 2008

J. Micro-Nano Mech.

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A new generation of micro shear stress sensors and flexible PCB for the general purpose of flow separation detection and control is presented here. A novel MEMS shear stress sensor array featuring integration of discrete micro sensors and polyimide substrate has been developed. Then, CFD (Computational Fluid Dynamics) simulations were performed to estimate the corresponding shear stress distribution within the column cylinder aerofoil at flow conditions are the velocity of 17.3 m/s, which is according to the Re of 1×10 5 . In the wind tunnel tests, by disposing the two sensor arrays output signals of the sensors output voltages means and RMS values, the results proved by these flexible arrays could detect the location of the fluid separation point in time.

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“…The films are urgent components for both actuators and sensors in the MEMS and microoptical devices such as micropumps, atomic force microscope (AFM), ultrasonic micromotors [1], infrared (IR) detector arrays [2], micromixer [3], micromirrors, microrelaies [4], pressure micro sensors [5,6], stress micro sensors [7] and so on.…”

Section: Introductionmentioning

confidence: 99%

Development of characterization of PZT thick films fabricated by an improved sol-gel method

Hsu

Kuo

Jang

2005

2005 IEEE International Conference on Robotics and Biomimetics - ROBIO

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the development of next-generation pOliable MEMS (Micro-Electrical-Mechanical systems) call for PZT (lead zirconate titanate oxide) film sensors and actuators with thickuess in the range of 1-10 !lm. The aim of this project is to fabricate and characterize PZT films with the thickuess between 1 and 10 !lm by an improved sol-gel method. Two techniques were applied to improve the conventional sol-gel processing: precursor concentration modulation, rapid thermal annealing. Based on the inspection of XRD spectra and SEM, the films of one, two, three, and sixteen coatings from the same sol show the correct crystalline phase. Also the stmcture and morphology of the synthesized film were dense and crack-free with the thickness between I and 10 !lm. The characterization methods of the PZT films for the dynamic performance and simulation were developed. The actuation tests demonstrated the silicon cantilever (4 cm x 7 mm x 0.56 mm) could be driven linearly by the PZT film (4 mm x 4 mm x 6.5 !lm) at the 1st bending mode of the specimen, 346 Hz, with the amplitude of 240 nm. According to experiments, the frequency of the PZT sensing signal was the same as the driving frequency and the signal strength was propOliional to the excitation voltage. This work successfully demonstrates the feasibility ofPZT thick films fabricated by the improved sol-gel method.

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Micro-electro-mechanical-systems direct fluid shear stress sensor arrays for flow control

Cited by 8 publications

References 5 publications

Fabrication and Characterization of PZT Thick Films for Sensing and Actuation

Fabrication and Characterization of PZT Thick Films for Sensing and Actuation

The fabrication and integration of a novel shear stress sensor array and its wind tunnel test

Development of characterization of PZT thick films fabricated by an improved sol-gel method

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