2022
DOI: 10.1016/j.infrared.2022.104160
|View full text |Cite
|
Sign up to set email alerts
|

Micro-crack defects detection of semiconductor Si-wafers based on Barker code laser infrared thermography

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
3
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
7
3

Relationship

2
8

Authors

Journals

citations
Cited by 21 publications
(5 citation statements)
references
References 28 publications
0
3
0
Order By: Relevance
“…This fitting method can enhance image quality. Total harmonic distortion (THD) [17] adopts the idea of microelectronics. Because the system is not completely linear, the output signal has additional harmonic components than the input signal, causing signal distortion.…”
Section: Simulation Results and Analysismentioning
confidence: 99%
“…This fitting method can enhance image quality. Total harmonic distortion (THD) [17] adopts the idea of microelectronics. Because the system is not completely linear, the output signal has additional harmonic components than the input signal, causing signal distortion.…”
Section: Simulation Results and Analysismentioning
confidence: 99%
“…To objectively evaluate the assay’s performance, signal-to-noise ratio (SNR) [ 30 ] is a widely used metric in thermography data processing. In this study, SNR is employed to assess the effectiveness of the proposed approach.…”
Section: Methodsmentioning
confidence: 99%
“…Analyzing thermal images aids in defect identification, with laser excitation being the most frequently used method for semiconductor chip defect detection among various external excitation techniques. Bu et al [151] investigated a method utilizing Barker code-modulated pulse compression waveforms for detecting microcrack defects in semiconductor silicon wafers. This technique employed an optical infrared thermal imaging device for transmission, where an infrared camera captured the thermal wave signal response to the laser-modulated Barker code waveform.…”
Section: Chipmentioning
confidence: 99%