Micro-channel fabrication on silicon wafer (100) using Rotary Ultrasonic Machining

Gangadhar, Mamatha Theetha; Vishnoi, Mohit; Srivastava, Siddharth; Bhatnagar, Mudit K.

doi:10.1007/s12633-022-01729-0

Cited by 4 publications

(1 citation statement)

References 32 publications

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“…To validate the optimal conditions, a confirmation experiment was carried out with the identical parameter settings as identified in the Taguchi L9 analysis. The MRR and surface roughness were measured and compared with the predicted values to assess the accuracy and reliability of the optimization results [30][31][32].…”

Section: Experimental Designmentioning

confidence: 99%

Experimental investigation and parametric optimization of rotary ultrasonic machining of different bio-ceramic materials

Vishnoi,

Mamatha,

Singh

et al. 2024

Phys. Scr.

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Rotary ultrasonic machining (RUM) is a highly promising technique for machining bio-ceramic materials due to its ability to achieve high precision and superior surface quality. This research focuses on an experimental investigation and parametric optimization of RUM for different bio-ceramic materials, intending to optimize multiple machining responses simultaneously. The experimental setup involves utilizing a 3-axis CNC ultrasonic machine to machine three different workpieces with slot cutting. Various machining parameters, such as tool feed rate and tool rotating speed, are studied to determine their impacts. An orthogonal array design based on Taguchi optimization is used to execute the experiments effectively. Material removal rate (MRR) and surface roughness (SR) are monitored and statistically analyzed as a consequence of the responses. ANOVA demonstrates that the tool feed rate has a considerable impact on the output reactions, with material type and tool rotational speed also playing a role. For multiple response optimizations, the Taguchi-Grey method is used to achieve the best trade-off between MRR and SR. The results demonstrate that material type has the most substantial impact on surface roughness, followed by feed rate and spindle speed. In contrast, feed rate has the most significant effect on the material removal rate, followed by the material type and spindle speed. The optimal parameter settings for achieving the desired output parameter are determined. The confirmation experiments validate the effectiveness of the optimized parameters. The feed rate of 5 mm/min, and spindle speed of 2500 rpm were discovered to be the optimal condition for achieving maximum MRR and minimum Ra. The MRR and surface roughness values were measured as 1.7266 mm3/min and 1.5611 microns respectively.

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Section: Experimental Designmentioning

confidence: 99%