Micro angular rate sensor design and nonlinear dynamics

Tsai, Nan-Chyuan; Sue, Chung-Yang; Lin, Chien-Hung

doi:10.1117/1.2778645

Cited by 11 publications

(13 citation statements)

References 10 publications

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“…2 [more details referred to our previous works (Tsai et al 2007;Tsai and Sue 2008a, b;Tsai et al 2008)]. The micro-gyroscope mainly consists of four key components: seismic inertial mass module (i.e., outer-ring), flexure spring, sensing differential capacitor set and rotational comb-drive electrodes.…”

Section: Design and Operation Of Vrgmentioning

confidence: 99%

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Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator

Tsai

Sue

2009

Microsyst Technol

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Owing to the imposed coupling accelerations such as quadrature error and cross-axis perturbation, the micro-machined gyroscope could not be unconditionally retained at resonant mode. Once the preset resonance is not sustained, the performance of the micro-gyroscope is accordingly degraded. In this paper, a direct model reference adaptive control loop which is integrated with a modified disturbance estimating observer (MDEO) is proposed to guarantee the resonant oscillations at drive mode and counterbalance the undesired disturbance caused by quadrature error and cross-axis perturbation. The parameters of controller are on-line innovated by the dynamic error between the MDEO output and expected response. In addition, Lyapunov stability theory is employed to examine the stability of the closed-loop control system. At last, the efficacy of evaluation of the exerted time-varying angular rate, which is to be detected and measured by the gyroscope, is verified by intensive simulations.

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Section: Design and Operation Of Vrgmentioning

confidence: 99%

“…This voltage change can be converted as the measure of the angular excitation, i.e., the angular velocity, _ h, by modulation/ demodulation technique. The equation of motion for the VRG can be expressed as follows (Tsai et al 2007;Tsai and Sue 2008a):…”

Section: Design and Operation Of Vrgmentioning

confidence: 99%

Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator

Tsai

Sue

2009

Microsyst Technol

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“…1,2 The vibration amplitude of the drive mode mostly defines the structural sensitivity of the microgyroscope, so a higher drive mode quality factor is always desired to both improve rate precision and lower power consumption. The most effective technique to increase the drive mode quality factor is sealing the microgyroscope in high vacuum.…”

Section: Introductionmentioning

confidence: 99%

Improvement of mechanical performance for vibratory microgyroscope based on sense mode closed-loop control

Xiao

Chen

et al. 2013

J. Micro/Nanolith. MEMS MOEMS

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Abstract. In order to improve its structural sensitivity, a vibratory microgyroscope is commonly sealed in high vacuum to increase the drive mode quality factor. The sense mode quality factor of the microgyroscope will also increase simultaneously after vacuum sealing, which will lead to a long decay time of free response and even self-oscillation of the sense mode. As a result, the mechanical performance of the microgyroscope will be seriously degraded. In order to solve this problem, a closed-loop control technique is presented to adjust and optimize the sense mode quality factor. A velocity feedback loop was designed to increase the electric damping of the sense mode vibration. A circuit was fabricated based on this technique, and experimental results indicate that the sense mode quality factor of the microgyroscope was adjusted from 8052 to 428. The decay time of the sense mode free response was shortened from 3 to 0.5 s, and the vibration-rejecting ability of the microgyroscope was improved obviously without sensitivity degradation. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…In general, the major function of a VIS is to minimize the magnitude of motion transmitted from a vibrating base via springs or dashpots to the interested mass module. Recently, micro-machined inertial sensors have been well developed and popularly applied to advanced safety vehicles (ASVs), robots, mobile phones, inertial measurement units (IMUs) and surgical instruments (Tsai et al 2007(Tsai et al , 2008a. However, micro-machined inertial sensors are particularly sensitive and vulnerable to various kinds of mechanical vibrations usually caused by the associated ambient environments (Tsai et al 2008a, b, c).…”

Section: Introductionmentioning

confidence: 99%

A novel active vibration isolator applied for micro-gyro by array of deposited electrodes

2009

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Micro-gyroscopes are usually driven into resonance so that the sensitivity and resolution can be enhanced. However, if any substantial vibration of the gyroscope base, over which the seismic proof mass is seated, was present, then the preset resonant frequency would be altered and the performances of the gyroscopes could be much degraded. In this paper, an innovative three degree-of-freedom (DOF) isolation system is proposed to attenuate the undesirable vibrations caused by the ambient environments. The mathematic model of the proposed 3-DOF micro-machined isolation system is established and analyzed such that the transfer function of transmissibility is obtained. The pull-in instability and associated pull-in voltage for the actuators of the isolation system are numerically unveiled so that the interval of the applied voltage to generate the electrostatic control force can be set to ensure the stability of the suspension system. In addition, a fuzzy logic proportion and derivative (PD) controller is synthesized for disturbance rejection. Five sensing electrodes, in cooperation with the isolator, are used to provide the feedback signals of the relative displacements of the proof mass with respect to the base, i.e., pitch, yaw and lateral linear displacement. Ten tuning electrodes are utilized to generate the required electrostatic forces to preserve the seismic proof mass from external disturbance. In comparison with the traditional PD action, the proposed fuzzy logic PD control strategy is verified by intensive simulations to illustrate its superior vibration isolation capability.

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Micro angular rate sensor design and nonlinear dynamics

Cited by 11 publications

References 10 publications

Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator

Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator

Improvement of mechanical performance for vibratory microgyroscope based on sense mode closed-loop control

A novel active vibration isolator applied for micro-gyro by array of deposited electrodes

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