Micro and surface analysis with fast heavy ions

Schweikert, E. A.; Summers, W. R.; Beug-Deeb, M. U. D.; Filpus-Luyckx, P. E.; Quinones, L.

doi:10.1016/s0003-2670(00)85658-5

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Advanced Analysis Techniques1

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1988

1992

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Cited by 8 publications

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“…Most recently Schweikert et al [ 8 ] have investigated the prospects of developing a technique based on this process for surface analysis. In contrast to the routinely used techniques, which require fluences of typically 10 12 –10 15 ions/cm 2 for analysis (and appreciably more for the coincidence techniques), useful information can be obtained from PDMS with much lower fluences (especially when fission fragments are used).…”

Section: Advanced Analysis Techniquesmentioning

confidence: 99%