Micro- and nanoscale tensile testing of materials

Gianola, Daniel S.; Eberl, C.

doi:10.1007/s11837-009-0037-3

Cited by 185 publications

(95 citation statements)

References 111 publications

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“…They are generally measured by tensile testing of either free-standing thin films without substrates [6][7][8][9] or supported thin films on compliant substrates [10][11][12] . The freestanding tensile test is able to measure the mechanical properties of thin films directly without cumbersome calculation from substrate effects.…”

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confidence: 99%

Tensile testing of ultra-thin films on water surface

et al. 2013

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The surface of water provides an excellent environment for gliding movement, in both nature and modern technology, from surface living animals such as the water strider, to LangmuirBlodgett films. The high surface tension of water keeps the contacting objects afloat, and its low viscosity enables almost frictionless sliding on the surface. Here we utilize the water surface as a nearly ideal underlying support for free-standing ultra-thin films and develop a novel tensile testing method for the precise measurement of mechanical properties of the films. In this method, namely, the pseudo free-standing tensile test, all specimen preparation and testing procedures are performed on the water surface, resulting in easy handling and almost frictionless sliding without specimen damage or substrate effects. We further utilize van der Waals adhesion for the damage-free gripping of an ultra-thin film specimen. Our approach can potentially be used to explore the mechanical properties of emerging twodimensional materials.

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confidence: 99%

Tensile testing of ultra-thin films on water surface

et al. 2013

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“…As force loading and sensing are prerequisites for microassembly and mechanical behavior testing of microstructures, various methods and experimental setups have been developed and applied for the measurement of force and deformation. (1,2) Microcantilevers are important microcomponents that have various applications, such as actuators (3,4) for micromanipulation and force sensors. (5)(6)(7) The key component of the widely used atomic force microscope (AFM) (8,9) is the probe, which is a specific kind of cantilever.…”

Section: Introductionmentioning

confidence: 99%

Measurement of Deformation and Force for Microcantilevers Based on Feature Point Matching and Digital Image Correlation

2015

Sensors and Materials

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Key words: microcantilever, micro force measurement, feature point matching, affine invariant feature descriptor, digital image correlationThe measurement of deformation and force for microcantilevers is an important issue in microassembly. An optical method based on local feature point matching and the digital image correlation (DIC) for deformation and force measurement of microcantilevers is proposed. Images of a microcantilever before and after deformation are obtained by an optical microscope. Using the Laplace-of-Gaussian (LOG) operator, feature points with local extreme response values are detected in the scale space in images before and after deformation. For each LOG feature point, an affine-invariant closed region is extracted based on which the sub-pixel position of the LOG point is relocated as the center of gravity of the closed region and an affine-invariant feature descriptor is constructed. Corresponding points in images before and after deformation are matched according to their affine invariant descriptors. To obtain the displacement of feature points with a higher resolution in bending deformation, the digital image correlation algorithm with a third-order transformation function is used and initialized by the sub-pixel information of matched points. The deformation of the microcantilever can be calculated by fitting the displacement of the matching points with the beam's bending deflection formula under the plane stress condition. Then, the force values as well as the position where the loader comes in contact with the cantilever are calculated through the least-squares method. The validity of the proposed method is verified through experiments on actual microcantilever deformation and comparison with other methods.

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“…[19][20][21] Further details on the history and recent developments of electron microscopy based in situ testing devices are given by Legros et al 8 In summary, the whole span of applications from tensile testing to in situ tribology for both organic and inorganic mater in amorphous and crystalline state is now being covered. [22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] Even the first commercial solutions emerge for both SEM and TEM, mainly employing a patented three plate capacitor design for applying forces and measuring displacements at the same time. 7,19,38,39 MEMS technology integrated into electron microscopes currently offers the best force and displacement resolution.…”

Section: Introductionmentioning

confidence: 99%

A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

Romeis

Paul

Ziener

et al. 2012

Review of Scientific Instruments

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We report on the development and characterization of a novel in situ manipulation device to perform stressing experiments on the submicron scale inside a high resolution field emission scanning electron microscope. The instrument comprises two main assembly groups: an upper part for positioning and moving a mounted probe and a force sensor as well as a specimen support as lower part. The upper part consists of a closed loop tripod piezoelectric scanner mounted on a self-locking coarse positioning stage. Two interlocked steel springs and a linear variable differential transformer measuring the springs’ deflections compose the lower part of the instrument. This arrangement acts as force-sensor and sample support. In comparison to already well-established concepts a wide measuring range is covered by adjusting the spring constant between 30 N/m and 50000 N/m. Moreover, the new device offers striking advantages with respect to force calibration and sample deformation measurements. Force calibration is performed using the eigenfrequency of the force detection system directly inside the SEM. Deformation data are obtained with high accuracy by simultaneously recording displacements above and below the specimen. The detrimental apparatus compliance is determined, and the influence on measured data subsequently minimized: an easy to validate two-springs-in-series model is used for data correction. A force resolution in normal direction of 100 nN accompanied by a sample deformation resolution of 5 nm can be achieved with the instrument using an appropriate load cell stiffness. The capabilities and versatility of this instrument are exemplified by compression experiments performed on submicron amorphous silica particles.

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Micro- and nanoscale tensile testing of materials

Cited by 185 publications

References 111 publications

Tensile testing of ultra-thin films on water surface

Tensile testing of ultra-thin films on water surface

Measurement of Deformation and Force for Microcantilevers Based on Feature Point Matching and Digital Image Correlation

A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

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