Micro- And Nano-Engineering of Semiconductor Compounds and Metal Structures Based on Electrochemical Technologies
Eduard V. MONAICO
Abstract:This paper aims to address the challenges of micro- and nano-engineering semiconductor compounds and fabricating metal-semiconductor nanocomposite materials by developing theoretical concepts for the application of electrochemical nanostructuring technologies to semiconductor substrates. It includes identifying the technological conditions for controlled electrochemical etching to create nanostructured semiconductor templates with wide bandgaps, such as III-V semiconductors (InP, GaAs, GaN) and II-VI compounds… Show more
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