Micro acoustic metamaterials for innovative AlN/AlScN-based RF MEMS

Abstract

To my mother and my father. i Contents List of Figures iv List of Tables xii vi 4.5 (a) At-resonance FEM simulated admittance responses (Y) (blue-line) of the 2DRR presented in this work (e.g. with the overhang corrugations, O.C.) and of the corresponding design without O.C. (yellow-line). The same Q (200) has been considered in both simulations. Evidently, the 2DRR reported in this work shows a 0.4 dB boost in |Y (f res)| due to a 5% larger k t 2. The total displacement magnitude distribution across each rod's top surface is also reported for both devices (b), demonstrating how the O.C permit to suppress the modal distortion originated from the lateral stress-free boundaries.