2015
DOI: 10.1088/0022-3727/48/7/075102
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Meyer Neldel rule application to silicon supersaturated with transition metals

Abstract: This paper presents the results for the transverse conductance across a bilayer formed by supersaturating with diverse transition metals a thin layer of a silicon wafer. The layer is formed by ion implantation and annealed by pulsed laser melting. The transverse conductance is exponentially activated, obtaining values ranging from 0.018 to 0.7 eV for the activation energy and pre-exponential factors of 10 -2 -10 12 S depending on the annealing energy density. A semi-logarithmic plot of the pre-exponential fact… Show more

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Cited by 8 publications
(5 citation statements)
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“…The measured mobility is electron-dominated for the whole range of temperatures (20-300 K). These results are in good agreement with previously reported results of similar hyperdoped structures, such as Si:Ti [21] and Si with other transition metals (Cr, V) [25]. If we apply the model described in 2.4 with F = 1 in the region where the layers are totally coupled, we can extract the values of the sheet conductance of the hyperdoped layer, which is shown in figure 6, just by subtracting the sheet conductance of the substrate to the measured value.…”
Section: Electrical Resultssupporting
confidence: 93%
See 1 more Smart Citation
“…The measured mobility is electron-dominated for the whole range of temperatures (20-300 K). These results are in good agreement with previously reported results of similar hyperdoped structures, such as Si:Ti [21] and Si with other transition metals (Cr, V) [25]. If we apply the model described in 2.4 with F = 1 in the region where the layers are totally coupled, we can extract the values of the sheet conductance of the hyperdoped layer, which is shown in figure 6, just by subtracting the sheet conductance of the substrate to the measured value.…”
Section: Electrical Resultssupporting
confidence: 93%
“…The measured mobility is electron-dominated for the whole range of temperatures (20-300 K). These results are in good agreement with previously reported results of similar hyperdoped structures, such as Si:Ti [21] and Si with other transition metals (Cr, V) [25].…”
Section: Electrical Resultssupporting
confidence: 93%
“…The MN rule has been found for other electrical properties as the conductivity or for diffusion measurements. For instance, it has been reported for the conductance of a bilayer obtaining supersaturating a Si wafer with some metals as vanadium, zirconium, titanium or chromium, 25 and a value for the MN energy of 22 meV was found. Coutts and Pearsall found a MN energy of 31 meV for the reverse current of solar cells.…”
Section: Resultsmentioning
confidence: 99%
“…The high values of the sheet resistance point to a blocking mechanism between the PLM‐processed layer and the untreated substrate, since a parallel conduction would result in a sheet resistance lower than any of the layers (shown also in Figure A). This mechanism that blocks transversal conduction may be related to the formation of a potential barrier between the crystalline GaP substrate and the poorly crystallized surface layer after PLM . This potential barrier would be produced by the interface defects.…”
Section: Discussionmentioning
confidence: 99%