Metrology of pulsed radiation for 157-nm lithography

Abstract

In the framework of current development in 157-nm lithography we have investigated the performance of photodetectors with emphasis to their stability and linearity. The measurements were performed in the radiometry laboratories of the Physikalisch-Technische Bundesanstalt at the Berlin electron-storage rings BESSY I and BESSY II with spectrally dispersed synchrotron radiation as well as with highly pulsed F2 laser radiation at 157 nm in combination with a cryogenic radiometer as the primary detector standard. Relative standard uncertainties of as little as 1% were achieved for the calibration of photodetectors in the spectral range of ultraviolet and vacuum-ultraviolet radiation.

Performance of diamond detectors for VUV applications

“…A compilation of the contributions to the measurement uncertainties in the spectral responsivity is given in Refs. [8,9]. The responsivity of the MSM detectors shows the diamond band edge to be around 225 nm ($l g ) and displays a UV/visible ratio (200/500 nm) of more than four orders of magnitude.…”

Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser

“…Hence, the peak radiant power within a radiation pulse is much higher than the average power which may saturate, degrade or even destroy the solid state detectors commonly used for VUV radiation measurements. 6,7 The VUV-FEL at the TESLA Test Facility ͑TTF͒ at DESY in Hamburg 4 is expected to deliver an average radiant power of at least 20 W distributed among ten pulse trains per second of 7200 pulses with a pulse separation of 111 ns. A pulse duration as short as 0.1 ps leads to a peak power in the range of 1 GW.…”

Recent developments of wide-bandgap semiconductor based UV sensors

“…Details of the description of the PTB/BESSY II measuring stations can be found in [31,32]. The detector calibration facility provides a synchrotron beam, monochromatized by a NI monochromator with a spectral resolution of about 1% of the wavelength.…”