Proceedings of the 5th IMEKO TC22 Conference on Vibration Measurement 2023
DOI: 10.21014/tc22-2022.033
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Metrological Characterization of Digital Mems Accelerometers in Dynamic Conditions: An Investigation of Linearity in Amplitude and Temperature Effects

Abstract: In several applications, such as industrial plants monitoring, or peculiar manufacturing process, the sensors are subjected to a wide range of acceleration amplitude levels or shocks, as well as thermal changes, that could affect the micro electromechanical inner parts, altering their performance and reliability. In this work, by applying a calibration procedure developed at INRIM, the main sensitivity of digital MEMS accelerometers is evaluated, as a function of amplitude, in the frequency domain. Moreover, a… Show more

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Cited by 2 publications
(2 citation statements)
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“…Moreover, it should be noted that potential variables that could influence sensitivity measurements were previously investigated [ 60 ]: the thermal effects on sensors are considered negligible, at least in the range from −20 °C to 80 °C, as well as the stress/fatigue effects due to high vibration amplitude levels or shocks. This evidence allows one to guarantee the stability of the investigated DUTs in operating conditions, although more severe analysis based on accelerated aging methods (not investigated here) could provide different results related to long-term stability.…”
Section: Methodsmentioning
confidence: 99%
“…Moreover, it should be noted that potential variables that could influence sensitivity measurements were previously investigated [ 60 ]: the thermal effects on sensors are considered negligible, at least in the range from −20 °C to 80 °C, as well as the stress/fatigue effects due to high vibration amplitude levels or shocks. This evidence allows one to guarantee the stability of the investigated DUTs in operating conditions, although more severe analysis based on accelerated aging methods (not investigated here) could provide different results related to long-term stability.…”
Section: Methodsmentioning
confidence: 99%
“…Although calibrations are conventionally performed in compliance with constant climatic requirements, harsh or critical environmental conditions, such as large temperature variation, humidity, magnetic fields, mechanical stress… are further contributes of uncertainty, affecting the sensor performance in operative conditions. Then, it could be useful also to verify the stability (or the dependency) of sensor indications with respect to known physical occurrences [31].…”
Section: Uncertainties Contributionsmentioning
confidence: 99%