Abstract:In order to set up the well-balanced defect inspection recipe on right inspection tool, it is important to evaluate the tradeoff between inspection throughput and sensitivity. The sensitivity of defect inspection is difficult to define because it depends not only on defect size but also the shape and material of defects. This paper describes a methodology to quantitatively evaluate the sensitivity as a function of throughput by making use of Programm Defect Array (PDA). This methodology allows us to assess the… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.