Abstract:The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the qua… Show more
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