2005
DOI: 10.1007/s00339-005-3422-y
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Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating

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Cited by 16 publications
(3 citation statements)
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“…4(h). The size and amount of the debris strongly depend on the axial focus position and the irradiation energy [33,34]. The minimum diameter d min and maximum diameter d max were 0.94 μm and 1.24 μm, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…4(h). The size and amount of the debris strongly depend on the axial focus position and the irradiation energy [33,34]. The minimum diameter d min and maximum diameter d max were 0.94 μm and 1.24 μm, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…It has been demonstrated that high precision machining with femtosecond laser can achieve a significant improvement in quality for a wide range of materials such as metals [1][2][3][4][5]. If femtosecond laser ablation can eventually play a role in industrial machining, it is obviously desirable to understand the limitations in processing possibilities and the important parameters that determine these limitations in order to meet the demand of some particular applications.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, when a laser beam is irradiated into a material, some arguments have been made that a method of localizing thermal diffusion or reducing burrs in the material is required. 1) Nanosecond excimer and neodymium-doped yttrium aluminum garnet (Nd:YAG) lasers are the most commonly used lasers for micromachining, although a serious weakness in their use is the formation of a molten pool due to the relatively large heat-affected zone (HAZ). 2,3) However, the development of ultrashort pulse lasers, such as femtosecond lasers, to overcome the problems of thermal diffusion or burring has not only opened new possibilities in the fabrication of microstructures, but also increased the fundamental understanding of the interaction behaviors between a laser beam and a material; 4,5) we shall not provide further more description of the mechanism of thermal diffusion, reduction of burrs, and capillary mechanism in this paper, but will rather focus on the use of femtosecond lasers in the fabrication of microchannels.…”
Section: Introductionmentioning
confidence: 99%