Method for measuring time waveforms of minute sinusoidal displacements using continuous waves with a network analyzer

Abstract

This study proposes a method for precise measurement of time waveforms of minute sinusoidal displacements using continuous waves. The technique involves measuring the S-parameter of ultrasonic waves reflected from an object undergoing sinusoidal vibration with a network analyzer. When the sinusoidal displacement is not sufficiently small, second-order side peaks emerge in its inverse Fourier transform, alongside the main and first-order side peaks. This method, which incorporates second-order side peaks previously overlooked, enhances the accuracy of measurements. It facilitates precise measurement of sinusoidal displacements ranging from 0.3 to 50 µm at frequencies between 10 and 300 Hz.