2015
DOI: 10.1364/ao.54.006208
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Method for determination of the parameters of transparent ultrathin films deposited on transparent substrates under conditions of low optical contrast

Abstract: In the present work we suggest an original ellipsometric technique for independently determining strongly correlated refractive index and thickness of transparent ultrathin films. We demonstrate significant accuracy improvement for the single-wavelength null-ellipsometry measurements when using multiple incidence angles for the system "transparent film on a transparent substrate" studied in the thickness range of 1.0-20.0 nm and the low-contrast region for the film-substrate surface. A straightforward relation… Show more

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Cited by 25 publications
(15 citation statements)
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References 27 publications
(36 reference statements)
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“…Thickness and refractive index of graed coatings were examined using ellipsometry. Typical thickness of APTES, measured by ellipsometry was equal to 0.5-1.5 nm (in accord with literature 36,37 ). In turn, the thickness of the ATRP coating used as a substrate for POEGMA188 polymerization was equal to approximately 1 nm.…”
Section: Fabrication and Characterization Of The Poegma188supporting
confidence: 86%
See 1 more Smart Citation
“…Thickness and refractive index of graed coatings were examined using ellipsometry. Typical thickness of APTES, measured by ellipsometry was equal to 0.5-1.5 nm (in accord with literature 36,37 ). In turn, the thickness of the ATRP coating used as a substrate for POEGMA188 polymerization was equal to approximately 1 nm.…”
Section: Fabrication and Characterization Of The Poegma188supporting
confidence: 86%
“…The typical thickness of the graed APTES, measured by ellipsometry for the conditions used for glass functionalization, was equal to 0.5 nm. 36,37 The thickness of ATRP lms did not exceed 1 nm.…”
Section: Characterization Of Nanocomposite Coatingsmentioning
confidence: 97%
“…Table presents the dry thickness for each substrate measured by ellipsometry. Because our procedure leads to ultrathin brush layers, ellipsometry reaches its limits to obtain a reliable value for the layer thickness . To confirm the thickness values determined by ellipsometry, we studied our samples with AFM to derive the polymer layer thickness with a different analytical method.…”
Section: Resultsmentioning
confidence: 99%
“…This range of the ϕ angle corresponds to the region of the principal angle of incidence (where Δ ≈ π/2 or 3π/2) and thus ensures maximal sensitivity. To determine the average thickness d and refractive index n for the APTES and oligoperoxide- graft -PChMa coatings, we employ the iterative procedure for fitting of the (Ψ, Δ)-data recorded at optimal experimental conditions, using mono- and two-layer models described in the literature. ,, Raw data for angular dependencies of the ellipsometric parameters for PChMa coating after 12 h of the polymerization are presented in Figure S2.…”
Section: Methodsmentioning
confidence: 99%