Method for Analyzing Nitrogen Trifluoride Impurities in High-Purity Carbon Tetrafluoride by Gas Chromatography

Wang, Mengdan; Zhou, Yuxuan; Feng, Yuanyuan; Zhu, Liming; Li, Mengyang; Wang, Jinlong

doi:10.2139/ssrn.4590930

2023

DOI: 10.2139/ssrn.4590930

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Method for Analyzing Nitrogen Trifluoride Impurities in High-Purity Carbon Tetrafluoride by Gas Chromatography

Mengdan Wang,

Yuxuan Zhou,

Yuanyuan Feng

et al.

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Method for Analyzing Nitrogen Trifluoride Impurities in High-Purity Carbon Tetrafluoride by Gas Chromatography

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