Method and experimental arrangement for Al thin film deposition from r.f. metal plasma with simultaneous self-ion bombardment

Gusev, I.V.; Belevsky, V.P.

doi:10.1016/s0168-583x(00)00252-4

Cited by 4 publications

(2 citation statements)

References 29 publications

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“…In addition to the generation of thermal stress, water vapor can be released from the polymer due to substrate heating, thus increasing the oxygen content in the deposited thin film [161]. Modeling of the kinetics of substrate temperature were recently carried out by Mohnjuk et al in the case of a RF plasma deposition [162], and by Andritschky et al [148] in case of magnetron sputtering. Taking the LCTE of SiO x equal to 2.7 .…”

Section: Thermal Stressmentioning

confidence: 99%

Durability of nanosized oxygen-barrier coatings on polymers

Leterrier

2003

Progress in Materials Science

467

341

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Research on silicon oxide thin films developed as gas-barrier protection for polymer-based components is reviewed, with attention paid to the relations between (i) coating defects, cohesive strength and internal stress state, and (ii) interfacial interactions and related adhesion to the substrate. The deposition process of the oxide from a vapor or a plasma phase leads in both cases to the formation of covalent bonds between the two materials, with high adhesion levels. The oxide coating contains nanoscopic defects and microscopic flaws, and their respective effect on the barrier performance and mechanical resistance of the coating is analyzed. Potential improvements are discussed, including the control of internal stresses in the coating during deposition. Controlled levels of compressive internal stresses in the coating are beneficial to both the barrier performance and the mechanical reliability of the coated polymer. An optimal coating thickness, with low oxygen permeation and high cohesive strength, is determined from experimental and theoretical analyses of the failure mechanisms of the coating under mechanical load. These investigations are found relevant to tailor the interactions and stress state in the interfacial region, in order to improve the reliability of the coating/substrate assembly. #

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Section: Thermal Stressmentioning

confidence: 99%

Durability of nanosized oxygen-barrier coatings on polymers

Leterrier

2003

Progress in Materials Science

467

341

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“…[1][2][3][4][5][6] In order to estimate the energy flux density, several techniques have been used based, namely, on surface temperature measurements. This influences the film growth, modification, or etching processes.…”

Section: Introductionmentioning

confidence: 99%

Diagnostic system for plasma/surface energy transfer characterization

Thomann¹,

Semmar²,

Dussart³

et al. 2006

Review of Scientific Instruments

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A protection system for the JET ITER-like wall based on imaging diagnosticsa) Rev. Sci. Instrum. 83, 10D727 (2012); 10.1063/1.4738742Disentangling fluxes of energy and matter in plasma-surface interactions: Effect of process parametersThe knowledge of the effective energy deposited onto a surface by the reactive particles ͑ions, electrons, metastables, photons, etc.͒ in plasma processes such as thin-film deposition, sputtering, etching, etc., is of high interest to understand the basic mechanisms of energy transfer. In this article, a diagnostic is developed to directly measure the global energy transferred to surfaces ͑reactor walls, substrates, material to be modified, etc.͒ immerged in low-pressure plasmas. The diagnostic is based on a commercial HFM7-Vattel® microsensor, confined in a temperature-controlled substrate holder. The manufacturer calibration specifications are only given for atmospheric pressure. They cannot be used in low-pressure plasma conditions ͑typically 0.1-20 Pa͒. Thus, for this particular application, a calibration of the microsensor is required. It is performed at various pressures, between vacuum and the ambient, according to the NIST protocol and using a homemade blackbody ͑BB͒. It is shown that only curves obtained in vacuum or pressures below 0.1 Pa are valuable for a true calibration of the sensor. The others are perturbed by the heating of the gas in the BB surroundings. Measurements carried out in a typical transformer coupled plasma reactor in argon gas are presented. Typically the values are of the order of tens or hundreds of mW/ cm 2 in our experimental conditions. They are consistent with an estimation of the energy transferred by charged particles ͑ions and electrons͒ performed from Langmuir probe characterization of the plasma.

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Grain growth in thin Al films during deposition from partially ionized vapor

Gusev

Mokhniuk

2016

Nuclear Instruments and Methods in Physics Research Section B:

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Method and experimental arrangement for Al thin film deposition from r.f. metal plasma with simultaneous self-ion bombardment

Cited by 4 publications

References 29 publications

Durability of nanosized oxygen-barrier coatings on polymers

Durability of nanosized oxygen-barrier coatings on polymers

Diagnostic system for plasma/surface energy transfer characterization

Grain growth in thin Al films during deposition from partially ionized vapor

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