2023
DOI: 10.1364/oe.488959
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Metasurfaces integrated with a single-mode waveguide array for off-chip wavefront shaping

Abstract: Integration of metasurfaces and SOI (silicon-on-insulator) chips can leverage the advantages of both metamaterials and silicon photonics, enabling novel light shaping functionalities in planar, compact devices that are compatible with CMOS (complementary metal-oxide-semiconductor) production. To facilitate light extraction from a two-dimensional metasurface vertically into free space, the established approach is to use a wide waveguide. However, the multi-modal feature of such wide waveguides can render the de… Show more

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Cited by 6 publications
(4 citation statements)
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“…All meta-waveguides, including both the phase gradient metawaveguides discussed in previous works [28] and the amplitude gradient meta-waveguides proposed here, are based on scattering a guided mode off chip using a series of meta-atoms. This scattering determines the off-chip wavefront shaping, but also leads to a detrimental shadowing effect [37]. As the residual intensity decreases further down the waveguide, the phase gradient approach always results in a limited effective aperture [28].…”
Section: Amplitude Gradient-based Metasurface Designmentioning
confidence: 99%
See 1 more Smart Citation
“…All meta-waveguides, including both the phase gradient metawaveguides discussed in previous works [28] and the amplitude gradient meta-waveguides proposed here, are based on scattering a guided mode off chip using a series of meta-atoms. This scattering determines the off-chip wavefront shaping, but also leads to a detrimental shadowing effect [37]. As the residual intensity decreases further down the waveguide, the phase gradient approach always results in a limited effective aperture [28].…”
Section: Amplitude Gradient-based Metasurface Designmentioning
confidence: 99%
“…1), we can define a deflection angle α for the output light λ 0 with respect to the vertical z direction. This angle α can be expressed as [37] α arcsin λ 0 1…”
Section: Beam Expander As the First Functional Devicementioning
confidence: 99%
“…39−41 To mitigate the impact of inherent ohmic losses 42 in metal materials, subsequent works shift to dielectric waveguides to realize on-chip metasurfaces for holographic displays. Although single resonance phase modulation, 43,44 detour phase modulation, 30,32,45,46 and geometric phase modulation 34,47−49 have been verified in on-chip metasurfaces, the limitation of monotonic phase modulation inevitably introduces channel crosstalk in the process of implementing multidimensional multiplexing. Achieving independent control of phase and amplitude among different channels remains challenging, especially when facing illuminations from both free space and waveguide.…”
Section: Introductionmentioning
confidence: 99%
“…Incorporating metasurfaces into waveguide devices extends their applications, infusing fresh innovation into the realm of integrated optics; some typical applications are ultracompact wavelength or polarization demultiplexer, mode conversion, optical diodes, and radiation field control. Based on the principle of resonance phase, on-chip focusing, beam steering, and polarization selection functions have been realized using metallic antennas. To mitigate the impact of inherent ohmic losses in metal materials, subsequent works shift to dielectric waveguides to realize on-chip metasurfaces for holographic displays. Although single resonance phase modulation, , detour phase modulation, ,,, and geometric phase modulation , have been verified in on-chip metasurfaces, the limitation of monotonic phase modulation inevitably introduces channel crosstalk in the process of implementing multidimensional multiplexing. Achieving independent control of phase and amplitude among different channels remains challenging, especially when facing illuminations from both free space and waveguide.…”
Section: Introductionmentioning
confidence: 99%