Effect of water absorption of dielectric underlayers on crystal orientation in Al-Si-Cu/Ti/TiN/Ti metallization In situ environmental transmission electron microscopy is employed to study the effect of Au composition in Cu-Au alloys on the orientations of oxide islands during the initial-stage oxidation of Cu-Au (100) alloys. An orientation transition from nucleating epitaxial Cu 2 O islands to randomly oriented oxide islands is observed upon increasing the oxygen gas pressure. By increasing the Au composition in the Cu-Au alloys, both the oxide nucleation time and saturation density of oxide islands increase, but the critical oxygen pressure leading to nucleating randomly oriented Cu 2 O islands decreases. It is shown by a kinetic model that such a dependence of the critical oxygen pressure on the alloy composition is related to its effect on two competing processes, the oxide-alloy structure match and the effective collision of oxygen atoms, in determining the overall nucleation rate of oxide islands during the oxidation. V C 2012 American Institute of Physics.