1997
DOI: 10.1088/0963-0252/6/2/012
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metastable level density and temperature measurement in a low-density argon plasma

Abstract: Temperature and density measurements of the 4s 3 P 2 argon metastable atom level in a weakly diffusion ionized argon plasma are presented and discussed. The steady state collisionless unmagnetized plasma is generated at a gas pressure of 50 mPa, extruded by hot filament DC discharges and diffused in a chamber of about 40 l volume. The temperature is measured from the absorption linewidth and the density from the spectral absorption coefficient of a low-cost single-mode diode laser (801 479 nm) by scanning its … Show more

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Cited by 24 publications
(19 citation statements)
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“…[12][13][14] There have been a number of experiments and theoretical calculations especially on argon atom metastable states (1s 3 and 1s 5 in Paschen notation) density with regard to plasma power or pressure. In experiments, various techniques such as laser induced fluorescence (LIF), [15][16][17][18] laser absorption spectroscopy (LAS), 16,[19][20][21][22][23][24][25] and optical emission spectroscopy (OES) (Refs. [26][27][28][29] were used to measure 1D or 2D distribution of metastable density.…”
Section: Introductionmentioning
confidence: 99%
“…[12][13][14] There have been a number of experiments and theoretical calculations especially on argon atom metastable states (1s 3 and 1s 5 in Paschen notation) density with regard to plasma power or pressure. In experiments, various techniques such as laser induced fluorescence (LIF), [15][16][17][18] laser absorption spectroscopy (LAS), 16,[19][20][21][22][23][24][25] and optical emission spectroscopy (OES) (Refs. [26][27][28][29] were used to measure 1D or 2D distribution of metastable density.…”
Section: Introductionmentioning
confidence: 99%
“…The density of metastable and resonant atoms can be determined in various ways: self-absorption [7][8][9][10][11] and absorption using the emission from a tunable diode laser [12][13][14][15][16][17][18] or the line from a spectral lamp [2,[19][20][21][22][23][24][25][26][27]. Utilizing lasers to determine the density of metastable and resonant atoms is advantageous, as it does not depend on the absorption-line spectral profile.…”
Section: Introductionmentioning
confidence: 99%
“…It is known that excited atoms (metastable) are essential for the balance of particles and energies in RF discharges in argon [18][19][20][21][22]. e spatial distribution of metastable particles in the jet of an inductive coupled RF at low pressure was studied in [15].…”
Section: Introductionmentioning
confidence: 99%