2000
DOI: 10.1016/s0968-4328(99)00095-5
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Metastability of Si1−yCy epilayers under 2MeV α-particle irradiation

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“…It was demonstrated, for example, that Si 1Ϫx C x alloys suffer of this effect and that it is particularly important for C yield. 21 In order to test this effect, repeated NRA channeling measurements were performed on the same spot. Effectively, in spite of the large beam diameter used, which allows us to reduce the ion fluence, the minimum yield increases with the integrated charge at a typical rate of 1.5%/100 C. This rate of damage was taken into account in the data reduction.…”
Section: B Substitutional Fraction Measurementsmentioning
confidence: 99%
“…It was demonstrated, for example, that Si 1Ϫx C x alloys suffer of this effect and that it is particularly important for C yield. 21 In order to test this effect, repeated NRA channeling measurements were performed on the same spot. Effectively, in spite of the large beam diameter used, which allows us to reduce the ion fluence, the minimum yield increases with the integrated charge at a typical rate of 1.5%/100 C. This rate of damage was taken into account in the data reduction.…”
Section: B Substitutional Fraction Measurementsmentioning
confidence: 99%