Metallic Seed Nanolayers for Enhanced Nucleation of Nanocrystalline Diamond Thin Films

Buijnsters, Josephus Gerardus; Célis, Jean-Pierre; Hendrikx, Ruud; Vázquez, Luís

doi:10.1021/jp4071482

Cited by 28 publications

(10 citation statements)

References 68 publications

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“…The choice of water over ethanol was necessary due to its higher viscosity, in order not to leak through the printer nozzles. Nonetheless, from Figure b, we estimated a high seeding density of the order of ≈10 10 cm −2 , which is a desirable order of magnitude to enable the growth of fully closed thin‐films of only 100–200 nm thickness, with good adhesion to the substrate and low surface roughness …”

Section: Resultsmentioning

confidence: 97%

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Sartori

Belardinelli

Dolleman

et al. 2018

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switches for wireless communication systems, as it promises high operating frequency in the GHz range, as well as narrow bandwidth (high Q-factor) and low phase noise. [1][2][3] This is thanks to diamond's excellent material properties, such as high Young's modulus (up to ≈10 6 N mm −2 ), high acoustic velocity (≈1.8 × 10 4 m s −1 ), [3] low thermoelastic damping, high thermal conductivity (>2000 W m −1 K −1 ), and low thermal expansion coefficient (≈10 −6 K −1 at 300 K). [4] The feasibility of using NCD for high-performance MEMS resonators has already been demonstrated in a range of devices, including cantilever beams, [5,6] tuning forks, [7] rings, [8] disks, [9][10][11] and spheres. [12] In particular, NCD MEMS structures that resonate with whispering gallery modes (WGM), such as disks and spheres, have shown much lower anchor losses and higher (f 0 × Q) figure of merit. [3,11] However, despite the recent progress, adding diamond structures into integrated circuits for a complete functional device remains a challenge. The current limitations relate to the difficulty in combining NCD with other microfabricated structures, mostly due to nanodiamond seeding requirements, but also due to the harsh environment during chemical vapor deposition (CVD) of the NCD film, as well as mechanical issues caused by intrinsic stress in the film. [13] Nanodiamond seeding in particular suffers from the process not being selective, i.e., instead of diamond being deposited and grown only where it is required on the device, most established methods consist of dispersing nanodiamond over a large substrate by, e.g., dip-coating, dropcasting, or spin-seeding, prior to film growth by CVD. [14] The grown NCD film needs then to be patterned by traditional photo-/e-beam lithography and lift-off techniques, which add substantial complexity and cost of fabrication. As a solution to circumvent low seeding density and plasma uniformity issues during growth of the NCD layer, Lebedev et al. proposed waferto-wafer bonding of pregrown NCD films onto another wafer to fabricate NCD disk resonators with high Q-factors (i.e., Q > 10 3 ). [9] This technique however did not remove the need to pattern the diamond after it was bonded onto the wafer. Possas et al. demonstrated the fabrication of NCD cantilever beams by patterning the nanodiamond seeding layer by means of sacrificial metal layer and etching, [15] but still top-down patterning by lithography was required. Akgul et al. reported Q-factors of the order of 7 × 10 4 for on-chip NCD disk resonators which required up to five masking/etching steps. [11] Yang et al., on the Diamond is a highly desirable material for state-of-the-art micro-electromechanical (MEMS) devices, radio-frequency filters and mass sensors, due to its extreme properties and robustness. However, the fabrication/integra tion of diamond structures into Si-based components remain costly and complex. In this work, a lithography-free, low-cost method is introduced to fabricate diamond-based micro-resonators: a modified home/office d...

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Section: Resultsmentioning

confidence: 97%

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Sartori

Belardinelli

Dolleman

et al. 2018

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“…The clustered C atoms in the subsurface region of TM powders and the type of TM seed powders used influence the nucleation process. Seeding with W, Mo, and Nb powder on a silicon (Si) substrate, the carbides form rapidly, along with the film's highest nucleation density and columnar structure [ 3 ]. Itoh et al demonstrated that a small-sized seeding powder would result in higher nucleation density due to the more significant number of grains than a larger-sized powder for a given weight percent of powder.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of diamond crystal growth on tungsten carbide inserts by HFCVD using various seeding powders

et al. 2022

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The hot filament chemical vapor deposition (HFCVD) process is used to synthesize diamond crystals on cemented carbide (WC–Co) SPUN inserts. Diamond (Dia.), carbon (GC-glassy spherical form), iridium (Ir), molybdenum (Mo), palladium (Pd), platinum (Pt), tungsten (W), and tantalum (Ta) powders were used as seeding materials for crystal growth. Scanning electron microscopy (SEM) data revealed the development of a few diamond crystals in platinum, iridium, and tungsten powders. The seeding with carbon, tantalum, and diamond powders formed clustered microcrystalline diamond (MCD) crystals, although other powders produced discrete crystals. Tantalum and diamond-seeded powders produced the most significant number and size of crystals. According to micro-Raman spectroscopy (µ-RS), tantalum powder had the lowest I D / I G ratio and the most excellent sp 3 bonding. X-ray diffraction (XRD) revealed the maximum diamond intensity in the (111) plane. According to atomic force microscopy (AFM), diamond and molybdenum powders had the largest grains, whereas tantalum powder had the smallest root mean square roughness value with a homogeneous grain distribution. The Vickers microhardness (VHN) test confirmed the highest hardness value for diamond and tantalum seeded powder coatings with the least amount of radial cracking. Field emission scanning electron microscopy (FESEM) revealed that both powders had higher film thickness values.

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“…In particular, several studies have focused on controlling the grain nucleation process through the use of seed layers or isolated seed crystals. The seed layers/crystals have been found to alter the nucleation kinetics [5], enhance epitaxial growth [6], and aid the growth of highly oriented polycrystalline films [7]. However, these techniques have only been used to control a narrow set of microstructural parameters in specific materials and their wider applicability is unclear.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of thin films with highly tailored microstructures

Sarkar

Rajagopalan

2018

Materials Research Letters

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We report a new methodology to synthesize thin films with exceptional microstructural control via systematic, in-situ seeding of nanocrystals into amorphous precursor films. When the amorphous films are subsequently crystallized by thermal annealing, the nanocrystals serve as preferential grain nucleation sites and control their micro/nanostructure. We demonstrate the capability of this methodology by precisely tailoring the size, geometry and spatial distribution of nanostructured grains in structural (TiAl) as well as functional (TiNi) thin films. This synthesis methodology is likely to be applicable to other amorphously grown materials and enables explicit microstructural control in a wide spectrum of thin films/coatings. IMPACT STATEMENTThis paper describes a novel synthesis methodology to precisely tailor the microstructure of thin films and reveals the mechanisms underlying this methodology using in-situ TEM annealing experiments. ARTICLE HISTORY

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Metallic Seed Nanolayers for Enhanced Nucleation of Nanocrystalline Diamond Thin Films

Cited by 28 publications

References 68 publications

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Synthesis of diamond crystal growth on tungsten carbide inserts by HFCVD using various seeding powders

Synthesis of thin films with highly tailored microstructures

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