Metallic coatings for MEMS structures

Korlyakov, A.V.; Mikhailova, O. N.; Serkov, A V

doi:10.1088/1757-899x/387/1/012040

Cited by 3 publications

(2 citation statements)

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“…Metals are another relevant category of materials for MEMS fabrication. Thin metal films are a part of microelectronics technology; they are used to form conductors, contacts, and reflecting coatings; in addition, they are often used as a structural layer or as sacrificial or protective layers [ 99 , 100 ]. For example, for electrochemical sensor applications, metals are still the main material class, especially for their excellent electrical conductivity, mechanical stability, and versatile chemical functionality [ 100 ].…”

Section: Materials For Am Fabrication Of Memsmentioning

confidence: 99%

3D-Printed MEMS in Italy

Aronne,

Bertana,

Schimmenti

et al. 2024

Micromachines

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MEMS devices are more and more commonly used as sensors, actuators, and microfluidic devices in different fields like electronics, opto-electronics, and biomedical engineering. Traditional fabrication technologies cannot meet the growing demand for device miniaturisation and fabrication time reduction, especially when customised devices are required. That is why additive manufacturing technologies are increasingly applied to MEMS. In this review, attention is focused on the Italian scenario in regard to 3D-printed MEMS, studying the techniques and materials used for their fabrication. To this aim, research has been conducted as follows: first, the commonly applied 3D-printing technologies for MEMS manufacturing have been illustrated, then some examples of 3D-printed MEMS have been reported. After that, the typical materials for these technologies have been presented, and finally, some examples of their application in MEMS fabrication have been described. In conclusion, the application of 3D-printing techniques, instead of traditional processes, is a growing trend in Italy, where some exciting and promising results have already been obtained, due to these new selected technologies and the new materials involved.

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Section: Materials For Am Fabrication Of Memsmentioning

confidence: 99%

3D-Printed MEMS in Italy

Aronne,

Bertana,

Schimmenti

et al. 2024

Micromachines

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“…However, silicon and glass are easy to break as they have low fracture strain which is about 0.1% [22][23][24]. Meanwhile, metals are very sensitive to chemical and environmental effect [25]. Some other disadvantages of those conventional MEMS materials, especially for the use as movable structure, are fragile and low flexibility.…”

Section: Introductionmentioning

confidence: 99%

Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review

et al. 2020

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In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous studies and explanations on the technology used to fabricate the polymer-based membrane component of the electromagnetically driven microactuators system are presented. The study on the materials and the synthesis method implemented during the fabrication process for the development of the actuators are also briefly described in this review. Furthermore, potential applications of polymer-based MEMS EM actuators in the biomedical field are also described. It is concluded that much progress has been made in the material development of the actuator. The technology trend has moved from the use of bulk magnetic material to using magnetic polymer composites. The future benefits of these compact flexible material employments will offer a wide range of potential implementation of polymer composites in wearable and portable biomedical device applications.

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