“…The decomposition of this compound gives HF and/or F 2 , which are strongly corrosive when water is present. Many studies have been performed on the thermal decomposition of SF 6 in electric discharges in connection with plasma etching [1][2][3] and photoreductive degradation [4]. In the decomposition of SF 6 by atmospheric pressure plasma, the removal efficiency was found to be more than 90%, and the production of toxic by-products, including SF 4 , SO 2 F 2 , S 2 F 10 , SOF 2 , and SOF 4 , was reported [5].…”