2019
DOI: 10.1088/1361-6595/ab1a90
|View full text |Cite
|
Sign up to set email alerts
|

Metal ion filtering of vacuum arc ion source through an inclined-aperture extraction grid

Abstract: The paper reports a novel method of increasing the fraction of H + ions produced by vacuum arc ion sources with metal hydride cathodes, which applies the ionic selectivity of an inclinedaperture extraction grid to separate and filter heavy metal ions. A simple theoretical model is built to describe the filtering mechanism. Since H + ions and Ti n+ (n=1∼3) ions produced by vacuum arc discharge have a great difference in the ratio of charge state and kinetic energy, H + ions are easy to pass through the incl… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
4
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(4 citation statements)
references
References 18 publications
(22 reference statements)
0
4
0
Order By: Relevance
“…The first one is the ideal uniform distribution as presented in figure 6a. Although the uniform distribution is difficult to achieve in experiments, it is still widely used for numerical study for the comprehension of vacuum arc discharge plasma [12,13]. The second one is the Gaussian distribution.…”
Section: Roles Of Extraction Gridmentioning
confidence: 99%
See 1 more Smart Citation
“…The first one is the ideal uniform distribution as presented in figure 6a. Although the uniform distribution is difficult to achieve in experiments, it is still widely used for numerical study for the comprehension of vacuum arc discharge plasma [12,13]. The second one is the Gaussian distribution.…”
Section: Roles Of Extraction Gridmentioning
confidence: 99%
“…The methods to increase the extracted H + /D + ion fraction have been widely studied experimentally and theoretically. These methods are based on the magnetic field to filter out metal ions [9], the filter based on the difference of angular distribution of light nonmental ions and metal ions during vacuum arc plasma expansion [10,11], the specially designed extraction grid including double-layer and inclined-aperture ones [12,13].…”
Section: Introductionmentioning
confidence: 99%
“…Another important property of deuterium ions is their velocity separation from the cathode heavy metal ions [1,8,11,17]. This separation phenomenon has aroused significant interest for optimizing the structural design of vacuum arc ion sources [7]. However, some other measurements observed no velocity separation between light and heavy ions [2,19].…”
Section: Introductionmentioning
confidence: 99%
“…The discovery of this phenomenon provides an idea for improving the performance of ion source [18] and film deposition [19]. Therefore, it is necessary to study the physical mechanism of separation of light ions and heavy ions in multicomponent vacuum arc discharge, which could provide theoretical guidance for further improving the performance of ion source and film deposition.…”
Section: Introductionmentioning
confidence: 99%