1998
DOI: 10.1007/s11664-998-0396-5
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Metal contacts to n-type GaN

Abstract: Contacts consisting of various single layer metals to n-type GaN have been formed and characterized. The current-voltage characteristics were measured for 17 different metals (Sc, Hf, Zr, Ag, Al, V, Nb, Ti, Cr, W, Mo, Cu, Co, Au, Pd, Ni, and Pt) deposited on the same epitaxial growth layer. The barrier height, ideality factor, breakdown voltage, and effective Richardson coefficients were measured from those metals which exhibited strong rectifying behavior. The barrier heights for these metal contacts were mea… Show more

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Cited by 177 publications
(111 citation statements)
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“…A number of metals have been investigated for AlGaN/GaN and InAlN/GaN HEMT structures, such as Ni, platinum (Pt), molybdenum (Mo), Cu, and iridium (Ir) [28]- [31] with Ni being the most commonly used contact metal. Usually, Au is used as a conductive overlay.…”
Section: Schottky Contactsmentioning
confidence: 99%
“…A number of metals have been investigated for AlGaN/GaN and InAlN/GaN HEMT structures, such as Ni, platinum (Pt), molybdenum (Mo), Cu, and iridium (Ir) [28]- [31] with Ni being the most commonly used contact metal. Usually, Au is used as a conductive overlay.…”
Section: Schottky Contactsmentioning
confidence: 99%
“…Precise and reliable control of the depletion layer width by the Schottky contact without leakage currents is extremely important in these devices. However, GaN-based Schottky interfaces are known to suffer from unusually large leakage currents under reverse bias [1][2][3]. Excess leakage currents through a Schottky gate strongly affects, not only gate-control and power consumption, but also the noise performance in GaN-based FET devices as recently pointed out [4].…”
Section: Introductionmentioning
confidence: 99%
“…In particular, leakage currents through Schottky contacts not only impede device reliability but also degrade power efficiency and noise performance in such devices. In spite of the fact that Schottky diodes formed on GaN and AlGaN are suffering from excess reverse leakage currents that are many orders of magnitude larger than the prediction of the thermionic emission ͑TE͒ model, [1][2][3][4][5][6] only a few studies have focused on the reverse-current characteristics quantitatively.…”
mentioning
confidence: 99%