Metal Complexes of Donor‐functionalized Fluorinatedβ‐Ketoiminates – Synthesis, Structure, and CVD Application

Abstract

Six alkali metal complexes of partly‐fluorinated, donor‐functionalized β‐ketoiminate ligands [L1Li (1), L1Na (2), L1K (3), L1Cs (4), L1 = OC(CF3)CHC(CH3)NCH2CH2OCH3; L2Li (5), L2Na (6), L2 = OC(CF3)CHC(CH3)NCH2CH2N(CH3)2] were prepared and structurally characterized. Reactions of L1Li with PtCl2 gave the homoleptic Pt complex L12Pt (7), which was characterized spectroscopically and by single‐crystal X‐ray diffraction and whose promising application as CVD precursor (chemical vapor deposition) is shown. Polycrystalline, pure Pt films were grown at 500 °C on SiO2@Si(100) substrates at 10–3 mbar and characterized by XRD, SEM, AFM, EDX and XPS.

A One‐Pot Synthesis of “K(hfa) glyme” Adducts: Effect of the Polyether Length on the Ion Coordination Sphere

“…This results into polymeric or oligomeric structures with low volatility. [14] Among alkali metals, potassium compounds are actively studied for various applications such as precursors for the metalorganic chemical vapor deposition (CVD) processes of the ferroelectric (K,Na)NbO 3, [15] the atomic layer deposition (ALD) of potassium oxide, [16] sol-gel processes to produce hybrid organic-inorganic materials [17] and in catalytic processes such as the ring-opening polymerization. [18][19][20] Potassium ion has a large ionic radius (r 6-coord = 1.51 Å), [13] which is responsible for interesting coordination moieties giving rise, in function of the coordinating ligands to extended oligomeric or polymeric network.…”