2011
DOI: 10.1016/j.jallcom.2010.12.175
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Metal-assisted etching of p-silicon—Pore formation and characterization

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Cited by 13 publications
(9 citation statements)
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References 24 publications
(35 reference statements)
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“…It is clear from Fig. 11 b that the etching of p-Si in 22 M HF containing 0.05 M potassium bromate for one hour represent the best conditions for obtaining micro- and nano-porous film on p-Si [35,44] .…”
Section: Introductionmentioning
confidence: 95%
See 1 more Smart Citation
“…It is clear from Fig. 11 b that the etching of p-Si in 22 M HF containing 0.05 M potassium bromate for one hour represent the best conditions for obtaining micro- and nano-porous film on p-Si [35,44] .…”
Section: Introductionmentioning
confidence: 95%
“…Quantum dots, nano-porous materials like Si and TiO 2 and nano-composites play an important role in solar energy conversion [34–41] . Etching of semiconductors plays the main role in the production of micro- and nano-porous clusters [42–44] .…”
Section: Introductionmentioning
confidence: 99%
“…Unfortunately, dry etching techniques [14,15], the dominant etching process for Herein, in this study, the uniform micro-sized trench arrays with controllable tilting profiles were reported using a metal-assisted chemical etching (MaCE) process [16][17][18][19]. To the best of our knowledge, this is the first report on realizing the Si micro-trenches with tunable tilting angles of trench sidewalls.…”
Section: Introductionmentioning
confidence: 96%
“…mins is observed to be smaller. The "attacked" silicon is referred as porous silicon as shown in literature [103][104][105][106], with potential application in optical sensors. The etching concentration in our experiment has been standardized to be HF:H 2 O 2 = 3:1.…”
Section: 5mins -3 Mins)mentioning
confidence: 99%
“…where the purpose of the experiment was not focused on ordered arrays of silicon nanostructures [103][104][105][106].…”
Section: Different Etching Behaviors Have Been Documented In Other Rementioning
confidence: 99%