Meso-scale ceramic hotplates – A playground for high temperature microsystems

Jiang, Bo; Muralt, Paul; Maeder, Thomas

doi:10.1016/j.snb.2015.06.127

Cited by 7 publications

(12 citation statements)

References 44 publications

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“…The bridge structure consisted of three LTCC beams, two narrow ones at the sides (1.0 mm wide) and a main one in the centre (2.4 mm wide). This approach enabled effective thermal decoupling with only 7 mm long bridges: the hot zone temperature reached above 600 C, while the cold zone temperature remained below 100 C [27]. A similar design can be found in silicon-based micro-reactors [12,28], with the difference that the high thermal conductivity of silicon materials requires a more sophisticated thermal decoupling structure.…”

Section: Reactor Designmentioning

confidence: 88%

“…Next, thick-film platinum heaters (CL11-6109, Heraeus, Germany), electrical solder pads (TC0306, Heraeus, Germany) and electrical vias (TC0308, Heraeus, Germany) were screen-printed (Aurel C900, Italy) onto the designated LTCC tapes, each of which followed by a drying process at 80 C for 10 min. The printed thickfilm Pt heater comprised two individual heating elements, inner and outer, for a better control of the heating uniformity [27].…”

Section: Fabrication Of the Ltcc Micro-reactormentioning

confidence: 99%

“…Details of this TCR calibration procedure can be found in the Ref. [27]. In such a way, the supplied electrical power, in another words the thermal power supplied electrically, and an operating temperature (T op ) at the reactor hot-zone were obtained.…”

Section: Characterizationmentioning

confidence: 99%

“…However, this problem can be overcome by a metallic hermetic bonding that joins silicon and ceramic materials, as explored in Refs. [19,20]. Park et al [8] has demonstrated a fully integrated fuel processor for the hydrogen production via the SR of methanol.…”

Section: Introductionmentioning

confidence: 99%

“…Besides, it is very difficult to grow dense thin films on the surface of fired LTCC. In contrast, thick-film platinum heating elements are easily integrated and operated due to their good compatibility with LTCC technology, and robustness at high temperature (>500 C) [27,32].…”

mentioning

confidence: 99%

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A low-temperature co-fired ceramic micro-reactor system for high-efficiency on-site hydrogen production

Jiang

Maeder

Santis-Alvarez

et al. 2015

Journal of Power Sources

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Section: Reactor Designmentioning

confidence: 88%

Section: Fabrication Of the Ltcc Micro-reactormentioning

confidence: 99%

Section: Characterizationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

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A low-temperature co-fired ceramic micro-reactor system for high-efficiency on-site hydrogen production

Jiang

Maeder

Santis-Alvarez

et al. 2015

Journal of Power Sources

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Dimensional and Structural Control of Silica Aerogel Membranes for Miniaturized Motionless Gas Pumps

Zhao

Jiang

Maeder

et al. 2015

ACS Appl. Mater. Interfaces

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With growing public interest in portable electronics such as micro fuel cells, micro gas total analysis systems, and portable medical devices, the need for miniaturized air pumps with minimal electrical power consumption is on the rise. Thus, the development and downsizing of next-generation thermal transpiration gas pumps has been investigated intensively during the last decades. Such a system relies on a mesoporous membrane that generates a thermomolecular pressure gradient under the action of an applied temperature bias. However, the development of highly miniaturized active membrane materials with tailored porosity and optimized pumping performance remains a major challenge. Here we report a systematic study on the manufacturing of aerogel membranes using an optimized, minimal-shrinkage sol-gel process, leading to low thermal conductivity and high air conductance. This combination of properties results in superior performance for miniaturized thermomolecular air pump applications. The engineering of such aerogel membranes, which implies pore structure control and chemical surface modification, requires both chemical processing know-how and a detailed understanding of the influence of the material properties on the spatial flow rate density. Optimal pumping performance was found for devices with integrated membranes with a density of 0.062 g cm(-3) and an average pore size of 142.0 nm. Benchmarking of such low-density hydrophobic active aerogel membranes gave an air flow rate density of 3.85 sccm·cm(-2) at an operating temperature of 400 °C. Such a silica aerogel membrane based system has shown more than 50% higher pumping performance when compared to conventional transpiration pump membrane materials as well as the ability to withstand higher operating temperatures (up to 440 °C). This study highlights new perspectives for the development of miniaturized thermal transpiration air pumps while offering insights into the fundamentals of molecular pumping in three-dimensional open-mesoporous materials.

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Platinum hotplate on thermoisolated polyimide membrane as perspective device used in MEMS

Predanocy

Hotovy

Andok

2021

Applied Physics of Condensed Matter (Apcom 2021)

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Meso-scale ceramic hotplates – A playground for high temperature microsystems

Cited by 7 publications

References 44 publications

A low-temperature co-fired ceramic micro-reactor system for high-efficiency on-site hydrogen production

A low-temperature co-fired ceramic micro-reactor system for high-efficiency on-site hydrogen production

Dimensional and Structural Control of Silica Aerogel Membranes for Miniaturized Motionless Gas Pumps

Platinum hotplate on thermoisolated polyimide membrane as perspective device used in MEMS

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