MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers

Cai, He; Zhang, X.M.; Yu, Aibing; Zhang, Q.X.; Liu, A.Q.

doi:10.1109/memsys.2007.4433041

Cited by 4 publications

(2 citation statements)

References 14 publications

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“…With such 3D system, the tunable laser has obtained an efficiency of 47% and a tuning range of 53.2 nm, significantly higher than the typical values of 8% and 10 nm, making it possible for many advanced applications. Successive work has focused on new designs to improve the coupling efficiency and the wavelength tuning range [4][5][6][7][8][9].…”

Section: Photonic Mems Tunable Lasersmentioning

confidence: 99%

“…Hence, inspired by the inherent advantages of such technology, we have been working particularly in the area of photonic MEMS devices and biophotonic chips, and have developed a series of new generation devices, such as thermooptic switches and different types of tunable lasers, which make use of the micromachined prisms/mirrors/gratings for switching and wavelength tuning [2][3][4][5][6][7][8][9][10][11][12][13]. The same principle is also extended to the polymer material microfluidic chips for the detection of living cells [14][15][16].…”

Section: Introductionmentioning

confidence: 99%

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Photonic MEMS: From Laser Physics to Cell Biology

Liu

Zhang

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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This paper reviews the recent progress from optical MEMS to photonic MEMS, nanophotonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.

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