MEMS technology for optical interconnects

Ford, Joseph E.

doi:10.1109/leos.2003.1251756

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“…Particularly, micro-electro-mechanical systems (MEMS) technology can be used to realize these devices [8], [9]. Optical interconnects provide a novel solution for electrical interconnect problems.…”

Section: Introductionmentioning

confidence: 99%

Magnetically-Actuated Swing-Type MEMS Mirror Pair for a Reconfigurable Optical Interconnect

Tsai

Chang

Liu

et al. 2013

J. Lightwave Technol.

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Two different mirror pairs of 45 • -assembled swingtype micro-electro-mechanical systems mirrors for optical interconnects are proposed. Magnetic beads are attached to the back of the mirror plate to enable magnetic actuation. The device is fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. The magnetically-actuated micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and system reconfiguration. Two designs of torsion springs are employed. The full swing angles are 16.9 • and 9.8 • for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively.

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Section: Introductionmentioning

confidence: 99%