MEMS sensors for high voltage lines

Abstract

The paper presents the application for the first time, to our knowledge, of MEMS devices in the field of high power, high voltage lines. We show how these devices can be used for measuring instantaneous voltage value in real-life industrial conditions. The high voltage MEMS device allows a voltage measurement relative error less than 0,1 % in normal conditions while during a strong earthquake (0,28g soil acceleration -'g' is the gravitational acceleration) it increases to 6 %. We present simulation results and the experimental realization of the optimized sensor model in polymer by using 3D Rapid Prototyping means.