MEMS Scanning Calorimeter With Serpentine-Shaped Platinum Resistors for Characterizations of Microsamples

Youssef, S.; Podlecki, Jean; Asmar, R. Al; Sorli, Brice; Ocheri, C; Foucaran, A.

doi:10.1109/jmems.2009.2013392

Cited by 19 publications

(10 citation statements)

References 17 publications

(12 reference statements)

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“…[ 1,2 ] Microstructured platinum has been used in a variety of fields from electronics, sensors, and microelectromechanical systems (MEMS) to Lab‐on‐a‐Chip (LOC) devices, cochlear implants, and fuel cells. [ 3–8 ] Pt is used for manufacturing of microheaters, [ 9,10 ] temperature‐, [ 11,12 ] gas‐, [ 13 ] flow‐, [ 14 ] or biosensors [ 15,16 ] as well as catalysts for fuel cells [ 7,17,18 ] and dye sensitized solar cells [ 19–21 ] to name but a few. However, microstructuring of Pt is challenging and usually done by physical vapor deposition (PVD) techniques such as electron beam deposition or sputtering.…”

Section: Introductionmentioning

confidence: 99%

High Resolution Patterning of an Organic–Inorganic Photoresin for the Fabrication of Platinum Microstructures

Luitz

Lunzer²,

Goralczyk

et al. 2021

Advanced Materials

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Platinum (Pt) is an interesting material for many applications due to its high chemical resilience, outstanding catalytic activity, high electrical conductivity, and high melting point. However, microstructuring and especially 3D microstructuring of platinum is a complex process, based on expensive and specialized equipment often suffering from very slow processing speeds. In this work, organic–inorganic photoresins, which can be structured using direct optical lithography as well as two‐photon lithography (TPL) with submicrometer resolution and high‐throughput is presented. The printed structures are subsequently converted to high‐purity platinum using thermal debinding of the binder and reduction of the salt. With this technique, complex 3D structures with a 3D resolution of 300 nm were fabricated. At a layer thickness of 35 nm, the patterns reach a high conductivity of 67% compared to bulk platinum. Microheaters, thermocouple sensors as well as a Lab‐on‐a‐Chip system are presented as exemplary applications. This technology will enable a broad range of application from electronics, sensing and heating elements to 3D photonics and metamaterials.

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Section: Introductionmentioning

confidence: 99%

High Resolution Patterning of an Organic–Inorganic Photoresin for the Fabrication of Platinum Microstructures

Luitz

Lunzer²,

Goralczyk

et al. 2021

Advanced Materials

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“…Several different configurations of micro-DSC for liquid sample appeared in recent years. Olson [2] and Youssef [16] studied the scanning calorimeter with liquid samples, yet their uses are limited to measure latent heat of transformation due to evaporation. Yao [17] built an AC calorimeter with glass capillary tube that consumed 10µL liquid.…”

Section: Introductionmentioning

confidence: 99%

Micro-differential scanning calorimeter for liquid biological samples

Wang

Siedler

et al. 2016

Review of Scientific Instruments

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We developed an ultrasensitive micro-DSC (differential scanning calorimeter) for liquid protein sample characterization. This design integrated vanadium oxide thermistors and flexible polymer substrates with microfluidics chambers to achieve a high sensitivity (6 V/W), low thermal conductivity (0.7 mW/K), high power resolutions (40 nW), and well-defined liquid volume (1 μl) calorimeter sensor in a compact and cost-effective way. We further demonstrated the performance of the sensor with lysozyme unfolding. The measured transition temperature and enthalpy change were in accordance with the previous literature data. This micro-DSC could potentially raise the prospect of high-throughput biochemical measurement by parallel operation with miniaturized sample consumption.

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“…When applied to characterizing biomolecular interactions and conformational transitions [1], DSC allows universally applicable, direct, label-free (i.e., the biomolecules are not labeled by florescent, enzymatic or radioactive material) detection [2], and is widely used in determining the thermodynamic properties of biomolecular interactions and conformational transitions [3,4]. However, the practical use of conventional DSC instruments is impeded by low throughput, large sample consumption and complicate construction [5].…”

Section: Introductionmentioning

confidence: 99%