MEMS Product Development

Abstract

Building on the foundation of the MEMS Reference Shelf and the Springer series on Microsystems**, the new series Microsystems and Nanosystems comprises an increasingly comprehensive library of research, text, and reference materials in this thriving field. The goal of the Microsystems and Nanosystems series is to provide a framework of basic principles, known methodologies, and new applications, all integrated in a coherent and consistent manner.

Accurate Sensorless Multistable Microsystem With a Single Actuator

“…Microdevices, such as various types of sensors, actuators, and micro-mechanisms, are being increasingly incorporated in advanced machines in all domains and different industrial and urban applications (Fitzgerald et al, 2021). The use of small devices can promote the incorporation of higher functionalities in smaller spaces.…”

Solution Properties of a New Dynamic Model for MEMS with Parallel Plates in the Presence of Fringing Field

“…In recent years, physical-mathematical scientific research has produced complete analytical models capable of simulating the behavior of parallel plate MEMS (micro-electromechanical systems) characterized by strong confirmation with experimental evidence [1][2][3][4]. Particularly, a wide range of models of electrostatic actuators, obtained through refined design techniques, have been developed for several applications [5,6], including MEMSbased metamaterial [7,8].…”

Electrostatic-Elastic MEMS with Fringing Field: A Problem of Global Existence

“…They are devices of various kinds (mechanical, electrical, and electronic) integrated in a highly miniaturized form onto the same substrate of semiconductor material (for example, silicon [3][4][5]) that combine the electrical properties of the semiconductor with the opto-mechanical properties. These are therefore "intelligent" systems that combine electrical [6], electronic [7], fluid management [8], optical [9], biological [10], chemical [11], and mechanical [12] functions in small spaces, associating all the possible management functions of a process to sensors and actuators [13].…”

“…Among them, electrostatic MEMSs with parallel metallic plates (one of which is fixed and the other deformable when an external electrical voltage V is applied) stand out, as they are versatile and easy to manufacture [1,2]. Many models have been formulated for electrostatic MEMSs with parallel metallic plates considering all the physical-technical specifications [1,2,13,14]. The physical-mathematical modeling of MEMS is particularly useful since, on the one hand, it allows for the evaluation of the mechanical tension states of the elements responsible for the deformation as a function of the intended use of the device (and vice versa) [6], and on the other hand, it permits the carrying out of predictive functionality tests which, when carried out on the real device, could lead to the destruction of the device itself [15].…”

“…Among them, the fourth-order integro-differential model studied extensively in [14] stands out; it has led to the achievement of interesting results with a global existence. However, the model studied in [14], although mathematically interesting, is not very attractive for engineering applications due to the mathematical formulation that characterizes it, which does not reconcile with the physical behavior of some components of the device (see [1,2,13]). Therefore, in this paper, starting with an adaptation of the model studied in [14] (so that it is more adherent to the physics of industrially produced devices), we present a new general N-dimensional model in which, by exploiting the Pelesko-Driscoll theory [17], the additive term λδ|∇u(x)| 2 represents the effect due to the fringing field.…”