MEMS process compatibility of multiwall carbon nanotubes

Cook, Eugene H.; Carter, David J. D.

doi:10.1116/1.3662082

Cited by 9 publications

(3 citation statements)

References 37 publications

(44 reference statements)

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“…FE cathodes can be formed as well by the deposition of synthesized CNTs in electrophoresis (Figure 2d,e) [81,82]. However, each of these methods are difficult to incorporate into the technology flow of, e.g., the electron gun fabrication, because of a several reasons: (1) low-throughput [83], (2) neither the synthesized CNT forest nor deposited CNTs are fully technologically compatible with the common thin-film technology to fabricate electronics [84], and (3) the emission is affected by the screening effect between vertically standing nanotubes [85].…”

Section: Cnt Suspension For Fe Cathodesmentioning

confidence: 99%

Field Emission Cathodes to Form an Electron Beam Prepared from Carbon Nanotube Suspensions

Laszczyk

2020

Micromachines

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In the first decade of our century, carbon nanotubes (CNTs) became a wonderful emitting material for field-emission (FE) of electrons. The carbon nanotube field-emission (CNT-FE) cathodes showed the possibility of low threshold voltage, therefore low power operation, together with a long lifetime, high brightness, and coherent beams of electrons. Thanks to this, CNT-FE cathodes have come ahead of increasing demand for novel self-sustaining and miniaturized devices performing as X-ray tubes, X-ray spectrometers, and electron microscopes, which possess low weight and might work without the need of the specialized equipped room, e.g., in a harsh environment and inaccessible-so-far areas. In this review, the author discusses the current state of CNT-FE cathode research using CNT suspensions. Included in this review are the basics of cathode operation, an evaluation, and fabrication techniques. The cathodes are compared based on performance and correlated issues. The author includes the advancement in field-emission enhancement by postprocess treatments, incorporation of fillers, and the use of film coatings with lower work functions than that of CNTs. Each approach is discussed in the context of the CNT-FE cathode operating factors. Finally, we discuss the issues and perspectives of the CNT-FE cathode research and development.

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Section: Cnt Suspension For Fe Cathodesmentioning

confidence: 99%

Field Emission Cathodes to Form an Electron Beam Prepared from Carbon Nanotube Suspensions

Laszczyk

2020

Micromachines

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“…However, there might be a considerable reliability concern when the materials/processes used in the fabrication are not compatible with each other [1]. The incompatibility could result from fabrication processes that require the use of chemicals and materials with different properties [2]. In this work, we focus on determining whether the application of a layer of polyimide is fully compatible with the etching process when a wet-based etchant of hydrofluoric (HF) acid is used during the fabrication process.…”

Section: Introductionmentioning

confidence: 99%

Delamination of polyimide in hydrofluoric acid

Al-mashaal

Cheung

2021

Acta Polytech

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Wet etching is a critical fabrication step for the mass production of micro and nanoelectronic devices. However, when an extremely corrosive acid such as hydrofluoric (HF) acid are used during etching, an undesirable damage might occur if the device includes a material that is not compatible with the acid. Polyimide thin films can serve as sacrificial/structural layers to fabricate freestanding or flexible devices. The importance of polyimide in microelectronics is due to its relatively low stress and compatibility with standard micromachining processes. In this work, a fast delamination process of a 4-μm-thin film of polyimide from a silicon substrate has been demonstrated. The films’ detachment has been performed using a wet-based etchant of HF acid. Specifically, the effect of HF concentration on the delamination time required to detach the polyimide film from the substrate has been investigated. This study is intended to provide the information on the compatibility of using polyimide films with HF, which can help in the design and fabrication of polyimide-based devices.

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“…While most of these applications have involved individual CNTs, which remain challenging to integrate within microfabrication processing, vertically aligned CNTs (forests) present a lithographically definable nanostructured material [10,11,12], which is mechanically robust, electrically conductive, and porous. Importantly, the properties of CNT forests depend exquisitely on the hierarchical organization of the CNTs as well as their individual dimensions and geometry.…”

Section: Introductionmentioning

confidence: 99%

Strain relaxation and resonance of carbon nanotube forests under electrostatic loading

Ya’akobovitz

Bedewy

Rao

et al. 2016

Carbon

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Electrostatic loading is widely used for sensing and actuation in miniaturized electromechanical systems, yet classical designs involve geometric patterning of solid materials such as silicon and metal films. Conductive nanoporous materials for electrostatics may enable engineering of new functionalities arising from their compliance, internal surface forces, and high surface area. Toward this end, we investigate the response of vertically aligned carbon nanotube (CNT) "forests" to DC and AC electrostatic loads. First,

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MEMS process compatibility of multiwall carbon nanotubes

Abstract: Articles you may be interested inEffect of oxygen plasma on field emission characteristics of single-wall carbon nanotubes grown by plasma enhanced chemical vapour deposition system

Cited by 9 publications

References 37 publications

Field Emission Cathodes to Form an Electron Beam Prepared from Carbon Nanotube Suspensions

Field Emission Cathodes to Form an Electron Beam Prepared from Carbon Nanotube Suspensions

Delamination of polyimide in hydrofluoric acid

Strain relaxation and resonance of carbon nanotube forests under electrostatic loading

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