MEMS patch antenna array with broadband and high-gain on double-layer silicon wafers

Liufeng, 杨柳风 Yang; Ting, 王婷 Wang

doi:10.3788/hplpb20152702.24129

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Methods Of Active Phased Array1

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“…Several researches have been put forward to overcome these limitation. In [18], it is concluded that the high resistivity silicon should be selected for the antenna system by comparative analysis. In order to obtain a suitable dielectric constant, a double layer composite structure with high resistivity silicon and low resistivity silicon is introduced.…”

Section: Methods Of Active Phased Arraymentioning

confidence: 99%