MEMS Optical Scanners for Microscopes

Invited Review Article: Imaging techniques for harmonic and multiphoton absorption fluorescence microscopy

“…They consist of a small mirror suspended by torsional bars and that are driven by a magnetic field produced by a coil around it. 100,101 These devices are essentially a very small-scale version of galvanometric mirrors. A commercial microscope by Olympus has incorporated this technology with a single element MEMS measuring 4.2ϫ 3 mm and is used to perform horizontal scans.…”

Miniature orthogonal optical scanning mirror excited by torsional piezoelectric fiber actuator

“…Optical scanners are the key components in various kinds of optical systems, including laser scanning microscopes [1], display systems [2,3], laser printers, barcode readers [4], and so on. These devices usually require high performance one-dimensional (1D) or two-dimensional (2D) scanners that possess large scanning angles at proper frequencies and large mirror sizes for high optical focus quality.…”

Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

“…Achieving a large clear optical aperture is a challenge for mirrorbased systems. High-resolution laser beam steering using one moving microlens array (MLA) and two stationary MLAs, where each is separated by one focal length, has been demonstrated by our group as well as other researchers [7]- [9]. Beam steering with single microlenses integrated into a microoptoelectromechanical system (MOEMS) has also been demonstrated [10]- [13].…”