MEMS/NEMS Techniques and Applications

Ergun, A.S.; Yaralioglu, G.G.; Oralkan, Ömer; Khuri‐Yakub, Butrus T.

doi:10.1007/0-387-25786-1_16

Cited by 13 publications

(5 citation statements)

References 101 publications

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“…Meantime, GaAs is the material of the semiconductor arms for it can provide lower thermal conductivity, higher electrons velocity and the ability to work under higher temperature conditions compared with Si. Another significant advantage is that it can be totally integrated with MMICs and other planar circuit structures [18].…”

Section: Basic Principlementioning

confidence: 99%

Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor

Han

Liao

2016

J. Micromech. Microeng.

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A new analytical method which can support full computer-aided circuit design for a microelectromechanical (MEMS) thermoelectric microwave power sensor operable at X-band is presented in this paper. A reduced dimensional form of a heat transfer equation is built in the radial direction based on point heat source approximation and precise volume mesh of the sensor. Frequency dependent losses are discussed to explain the sensitivity degradation with frequency. Based on this analysis, an electrical model for the power sensor is established. This approach facilitates the modeling of the coupled energy domains in the power sensor straightforwardly by means of a computer-aided simulation. Better estimation property is obtained compared to our previous works. Verifications are both conducted through ANSYS simulation and measurements with close agreements are observed. Relative errors between them are smaller than 13%. The deviations are discussed in detail. Fabrication of the thermoelectric power sensor is based on MEMS technology and the GaAs MMIC process.

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Section: Basic Principlementioning

confidence: 99%

Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor

Han

Liao

2016

J. Micromech. Microeng.

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“…Recent research and development in nanotechnology have contributed to design devices in nano and micro scale called nanoelectromechanical (NEMS) and microelectromechanical (MEMS) systems (Lyshevski, 2002). NEMS and MEMS may be used in many areas including automotive, aerospace, biotechnology, healthcare, office equipment and telecommunication (Leondes, 2006). Nano and micro devices, depending on requirements, can be manufactured with porous materials (Bhushan, 2004), functionally graded materials (FGMs) (Ashoori et al, 2017) and it commonly takes the form of plates and beams (Lam et al, 2003).…”

Section: Introductionmentioning

confidence: 99%

Effect of Kerr Foundation and in-Plane Forces on Free Vibration of FGM Nanobeams with Diverse Distribution of Porosity

Jankowski

2020

Acta Mechanica Et Automatica

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In the present paper, the effect of diverse distribution of functionally graded porous material and Kerr elastic foundation on natural vibrations of nanobeams subjected to in-plane forces is investigated based on the nonlocal strain gradient theory. The displacement field of the nanobeam satisfies assumptions of Reddy higher-order shear deformation beam theory. All the displacements gradients are assumed to be small, then the components of the Green-Lagrange strain tensor are linear and infinitesimal. The constitutive relations for functionally graded (FG) porous material are expressed by nonlocal and length scale parameters and power-law variation of material parameters in conjunction with cosine functions. It created possibility to investigate an effect of functionally graded materials with diverse distribution of porosity and volume of voids on mechanics of structures in nano scale. The Hamilton’s variational principle is utilized to derive governing equations of motion of the FG porous nanobeam. Analytical solution to formulated boundary value problem is obtained in closed-form by using Navier solution technique. Validation of obtained results and parametric study are presented in tabular and graphical form. Influence of axial tensile/compressive forces and three different types of porosity distribution as well as stiffness of Kerr foundation on natural frequencies of functionally graded nanobeam is comprehensively studied.

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“…The acoustic advantage of a CMUT is its good impedance matching without matching layers, especially to water [5]. The positive implication is a broadband transducer, allowing short acoustic pulses, resulting in improved image resolution.…”

Section: Introductionmentioning

confidence: 99%

“…The simulation of several coupled actuators and the fabrication of such free-standing structures are challenging. Multiphysical simulations are extensively performed with finite element methods (FEM) for CMUTs [5]. This approach is especially beneficial in order to calculate parameters of complex geometries or to investigate the interactions between physical domains in detail.…”

Section: Introductionmentioning

confidence: 99%

CMUT with mechanically coupled plate actuators for low frequencies

Krenkel

Stolz

Koch

et al. 2019

J. Micromech. Microeng.

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In this paper we present a structural analytical model for a capacitive micromachined ultrasonic transducer (CMUT), based on a sacrificial release fabrication process and comprised of electro-mechanical plate actuators transferring their motion to a coupling roof structure on top. The structure features a larger average displacement compared to conventional designs at lower operational frequencies. Low operational frequencies in the range of 40 kHz to 1 MHz are beneficial for airborne applications due to their frequency-dependent strong wave attenuation in air, limiting the signal-to-noise ratio. The eigenfrequency in dependence of the roof mass is calculated analytically and lumped elements, which can be used in equivalent circuits, are extracted. In addition, finite element analyses utilizing a shell-beam model are conducted. Experimental results, based on digital holographic microscopy, reveal the usability of the deduced model within an uncertainty of 8 %. The developed dimensionless form of the analytical model can be used for future design purposes.

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MEMS/NEMS Techniques and Applications

Cited by 13 publications

References 101 publications

Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor

Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor

Effect of Kerr Foundation and in-Plane Forces on Free Vibration of FGM Nanobeams with Diverse Distribution of Porosity

CMUT with mechanically coupled plate actuators for low frequencies

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