Mems microrelays

Wood, Robert L.; Mahadevan, R.; Dhuler, Vijay; Dudley, Bruce W.; Cowen, Allen; Hill, E.; Markus, K.

doi:10.1016/s0957-4158(98)00021-x

Cited by 36 publications

(10 citation statements)

References 5 publications

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“…Therefore, the application of the electrostatic device is limited. Thermally driven microrelays are also seldom researched due to their large power consumption and slow switch speed [2]. Compared with electrostatically driven microrelay and thermally driven microrelay, the microelectromagnetic relay is excellent because of its lower driving voltage (5 V), easy compatibility with the ordinary electric circuit voltage, and tolerance to the poor working conditions of dusty, humid, and low temperature.…”

Section: Introductionmentioning

confidence: 99%

Research on Microelectromagnetic Relays

Liu

2006

Front. Mech. Eng. China

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A new microelectromagnetic relay is presented and fabricated based on micromachining technology, aiming at the miniaturization and high manufacturing efficiency of electromagnetic relays. This microrelay is composed of a lower magnetic circuit, a planar exciting coil, and an upper magnetic armature. A complete magnetic circuit is composed, and the "ON" and "OFF" states are controlled by the current of the exciting coil. The dimension of this microrelay is 5 mm × 5 mm × 0.4 mm. The fabrication process mainly includes lithography, sputtering, electroplating, etching, sacrifice-layer technology, etc. Electromagnetic force is calculated theoretically. The calculation results are used for the optimization design of the armature and the number of turns of the exciting coil. A microelectromagnetic relay is fabricated and the initial test results are given. The resistance of the exciting coil is about 300 Ω. The switch-on state resistance is about 1.7 Ω at an exciting current of about 50 mA.

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Section: Introductionmentioning

confidence: 99%

Research on Microelectromagnetic Relays

Liu

2006

Front. Mech. Eng. China

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“…With this kind of actuator, the first device, a microrelay with a current-carrying capacity of 300 milliamps, was developed from Cronos. 16 In early years, one of the most popular electro-thermal microactuators was called a U-shaped actuator, which was proposed by Guckel et al in 1992. 17 The device comprises a single material structure and is composed of two suspended beams with variable cross sections joined at the free end, which constrains the tip to move in a lateral motion while the current is passed through the actuator.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion

Pan

Chang

Chen

2005

J. Micro/Nanolith. MEMS MOEMS

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We present a new electro-thermal microactuator with multidirectional in-plane motion by selectively applying a single potential across two of four contacts. The design principle is based on the asymmetrical thermal expansion of the structure with 1. different lengths and widths of the beams, 2. varying resistivities of the beams by selectively doping, and 3. rigorous control of the thermal boundary conditions. Analytical models are derived to describe the electro-thermo-mechanical performances of the actuator. The commercial finite element package ANSYS is used to demonstrate the feasibility of the design, to verify the analytical results, and to characterize the actuator in details under complex heat transfer conditions. The design parameters that significantly affect the performance of the actuator are discussed, including the structural dimension, selective doping, and heat transfer condition. Conventional silicon-based micromachining techniques compatible with IC processes are used to fabricate the microactuator. The phosphorous-doped polycrystalline silicon film by low pressure chemical vapor deposition ͑LPCVD͒ is used to demonstrate the effectiveness of the microactuator. In conclusion, it is found that input voltages ഛ7 V are required for the microactuator to achieve the maximum displacement in 8 m and the maximum tip force in 8 N with the operating temperature below 300°C, the power as low as 10 mW, and the response time about 30 msec in average.

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“…Microrelays are widely used in the field of electricalmechanical control, test equipment, telecommunications, and so on [1]. Among all types of actuation of the microrelay, the electrostatical actuation is the most frequently applied principle combining versatility and simple technology, and MEMS technology offers great promise in addressing the need for electrostatic microrelays.…”

Section: Introductionmentioning

confidence: 99%

A novel comb electrostatic microrelay with lateral-driven

Yang

et al. 2006

2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings

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The purpose of this paper is to present a novel epi-poly process microrelay with two-level comb electrostatic driven, the microrelay has a lateral contact structure, and it is driven by electrostatic actuators. By optimization designing for the structure, A 5V threshold voltage of the microrelay, depending upon geometrical parameter choices, can be achieved, and using sputtered gold as contact materials, the contact resistance is below 100m . Thus, the electrostatic microrelay is more suitable for the practice application than all previous reports, since the threshold voltage is compatible with the operating voltage of normal electronic circuit. IntroductionMicrorelays are widely used in the field of electricalmechanical control, test equipment, telecommunications, and so on [1]. Among all types of actuation of the microrelay, the electrostatical actuation is the most frequently applied principle combining versatility and simple technology, and MEMS technology offers great promise in addressing the need for electrostatic microrelays. As a key parameter, the threshold voltage of the electrostatic microrelay effects its practice application directly, but the driven voltage of all present electrostatic microrelays are not compatible with the working voltage of normal electronic circuit [2,3,4]. The purpose of this paper is to propose a novel lateral-driven microrelay, based on two-level comb and four-folded support beams structure. The theory model of the threshold voltage of the electrostatic microrelay is given, the theoretical model and the structure of the microrelay are confirmed by ANSYS software. It shows that the microrelay are more valuable and suitable for practice application than all previous reports, since the threshold voltage of this microrelay can be reduced to 5V, and it is compatible with the operating voltage of the normal electronic circuit.

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Mems microrelays

Cited by 36 publications

References 5 publications

Research on Microelectromagnetic Relays

Research on Microelectromagnetic Relays

Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion

A novel comb electrostatic microrelay with lateral-driven

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