MEMS Microgravity Measurement Module with Nano-g/Hz Noise Floor for Spaceborne Higher-Level Microgravity Scientific Experiment Applications

Wang, Qiu; Li, Zongfeng; Liu, Huafeng; Xu, Qiangwei; Yan, Shitao; Zhang, Leiming; Zhang, Shaolin; Song, Xiaoxiao; Qu, Ziqiang; Liu, Li; Liu, Jinquan; Tu, Liangcheng

doi:10.1021/acsaelm.1c00359

Cited by 12 publications

(3 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…4(c). A commercial seismometer (CMG-3ESPC, Güralp) was used to identify the angular misalignment of the sensitive axis between the two MEMS gravity sensors [37]. Fig.…”

Section: Calibration and Characterizationmentioning

confidence: 99%

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

Yang

Wang

et al. 2022

IEEE Trans. Instrum. Meas.

View full text Add to dashboard Cite

Precision measurements of local gravitational acceleration variations are of great importance in geophysical surveys. With advantages such as cost-effectiveness and portability, Micro-Electro-Mechanical system (MEMS)-based gravimeters have shown the potential for long-term gravity measurements. In this paper, aiming to further improve the stability of the instrument, the design considerations and system evaluations of a MEMS gravimeter are presented. With a linear spring design for the silicon proof-mass, a low natural frequency of ~14 Hz and a large linear range of ~10300 mGal are achieved with an ultra-low self-noise floor of 1.2 μGal/√Hz@1 Hz. By implementing a vacuum chamber system, the pressure variation is reduced from hundreds of Pa/day in atmosphere to a linear variation of ~6 Pa/day. In addition, an active temperature control system can suppress temperature fluctuations by 2 to 3 orders of magnitude within the band from 1×10 -4 Hz to 1×10 -2 Hz. The stability of the proposed MEMS gravimeter is demonstrated via long-term Earth tides observations within a 30-day time span, giving a correlation coefficient of 0.957 with the reference. An excellent bias instability of ≤4 μGal is demonstrated within the 8-3000 s averaging time range, representing one of the best performances to date in terms of stability for MEMS gravimeters. This shows the potential of high-performance MEMS gravimeters for petroleum and mineral prospecting, seismology and other geophysical applications.

show abstract

“…4(c). A commercial seismometer (CMG-3ESPC, Güralp) was used to identify the angular misalignment of the sensitive axis between the two MEMS gravity sensors [37]. Fig.…”

Section: Calibration and Characterizationmentioning

confidence: 99%

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

Yang

Wang

et al. 2022

IEEE Trans. Instrum. Meas.

View full text Add to dashboard Cite

show abstract

“…High-end capacitive accelerometers based on microelectromechanical system (MEMS) technology are widely applied in seismometers [ 1 , 2 ], inclination measurement [ 3 ], microgravity measurement [ 4 ], inertial navigation [ 5 ], etc. A high-resolution MEMS accelerometer with a noise floor of sub-µg

is commonly required for seismic-grade application [ 1 ].…”

Section: Introductionmentioning

confidence: 99%

Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers

Wang

Zhang

2023

Sensors

View full text Add to dashboard Cite

The high-order mechanical resonances of the sensing element in a high-vacuum environment can significantly degrade the noise and distortion performance of seismic-grade sigma–delta MEMS capacitive accelerometers. However, the current modeling approach is unable to evaluate the effects of high-order mechanical resonances. This study proposes a novel multiple-degree-of-freedom (MDOF) model to evaluate the noise and distortion induced by high-order mechanical resonances. Firstly, the MDOF dynamic equations of the sensing element are derived using the principle of modal superposition and Lagrange’s equations. Secondly, a fifth-order electromechanical sigma–delta system of the MEMS accelerometer is established in Simulink based on the dynamic equations of the sensing element. Then, the mechanism through which the high-order mechanical resonances degrade the noise and distortion performances is discovered by analyzing the simulated result. Finally, a noise and distortion suppression method is proposed based on the appropriate improvement in high-order natural frequency. The results show that the low-frequency noise drastically decreases from about −120.5 dB to −175.3 dB after the high-order natural frequency increases from about 130 kHz to 455 kHz. The harmonic distortion also reduces significantly.

show abstract

“…High-end capacitive accelerometers based on microelectromechanical system (MEMS) technology are widely applied in seismometers [1,2], inclination measurements [3], microgravity measurements [4], and inertial navigation [5], etc.…”

Section: Introductionmentioning

confidence: 99%

A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model

Wang,

Zhang,

Ding

2023

Sensors

View full text Add to dashboard Cite

Harmonic distortion is one of the dominant factors limiting the overall signal-to-noise and distortion ratio of seismic-grade sigma-delta MEMS accelerometers. This study investigates harmonic distortion based on the multiple degree-of-freedom model (MDM) established in our previous study. The main advantage of using an MDM is that the effect of finger flexibility on harmonic distortion is considered. Initially, the nonlinear relationship between the input acceleration and output signal is derived using the MDM. Then, harmonic distortion is simulated and described in terms of the nonlinear input–output relationship. It is found that finger flexibility and parasitic capacitance mismatch both decrease harmonic distortion. Finally, the experimental testing of harmonic distortion is implemented. By reducing the finger length to realize a higher stiffness and compensating for the parasitic capacitance mismatch, the total harmonic distortion decreases from −66.8 dB to −86.9 dB.

show abstract

MEMS Microgravity Measurement Module with Nano-g/Hz Noise Floor for Spaceborne Higher-Level Microgravity Scientific Experiment Applications

Cited by 12 publications

References 22 publications

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers

A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model

Contact Info

Product

Resources

About