MEMS manufacturing solutions

Fukui, Jumpei; Osanai, Makoto; Mizoroke, Shigeo; Khorram, Hamid R.

doi:10.1109/asmc.2015.7164419

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2016

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“…With such mass production, comes reduced cost. MEMS is now a mature industry where a lot of the research has been done in the area of the engineering process [41], cofabricating sensors with electronics (CMOS-MEMS) [42], reducing production time [43], improving yields [44] and developing new manufacturing technologies [45].…”

Section: Smart Sensorsmentioning

confidence: 99%

Adaptive process control and sensor fusion for process analytical technology

Mahony

Murphy

Panduru

et al. 2016

2016 27th Irish Signals and Systems Conference (ISSC)

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Increased globalisation and competition are drivers for process analytical technologies (PAT) that enable seamless process control, greater flexibility and cost efficiency in the process industries. This research aims to introduce an integrated process control approach, embedding novel sensors for monitoring in real time the critical control parameters of key processes in the minerals, ceramics, non-ferrous metals, and chemical process industries. The paper will discuss smart sensors, data fusion and process modelling and control in industrial applications with an emphasis on solutions enabling the real-time data analytics of sensor measurements that PAT demands.

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