MEMS ion-sorption high vacuum pump

Grzebyk, Tomasz; Knapkiewicz, Paweł; Szyszka, Piotr; Górecka-Drzazga, Anna; Dziuban, Jan

doi:10.1088/1742-6596/773/1/012047

Cited by 24 publications

(10 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In our opinion, the only acceptable solution is to build a MEMS alkali vapor cell in tandem with a micropump. Such a construction was proposed in the literature recently [87,92,93,94] and seems to be a natural step of future solutions.…”

Section: Conclusion and Final Remarksmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

View full text Add to dashboard Cite

This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods and sealing of the MEMS structure. Characteristics of each technology are collated and compared. The article’s rhetoric is guided by the proposed classification of MEMS cell fabrication methods and contains a historical outline of MEMS cell technology development.

show abstract

Section: Conclusion and Final Remarksmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

View full text Add to dashboard Cite

show abstract

“…Recently, Grzebyk et al developed a miniature ion pump fabricated by the anodic bonding of Si and glass, which results in a hermetically sealed cell. They realized a high-vacuum chip-scale cell using their developed miniature ion pump [ 15 , 16 , 17 , 18 ].…”

Section: Introductionmentioning

confidence: 99%

High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

Kurashima

Motomura

Yanagimachi

et al. 2023

Sensors

View full text Add to dashboard Cite

In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the distance between two opposing permanent magnets and size of these magnets, a magnetic mirror ratio value of 27 could be obtained, which is an electron confinement efficiency of over 90%. We also conducted an experiment on a high-efficiency discharge plasma source for a miniature ion pump using an optimized magnetic circuit. As a result, we revealed that the proposed magnetic circuit has a pronounced effect on plasma generation, particularly in the high-vacuum region.

show abstract

“…In 2014 [10,11], a new microcolumn solution was proposed that consists of all the parts needed to fabricate a miniature scanning electron microscope (Figure 1). The most important innovation of this instrument is that it is equipped with a miniature MEMS high vacuum micropump, which ensures a high vacuum (up to 10 −7 mbar) within the microdevice [12]. The device is designed as a stand-alone microscope that can operate without external high-vacuum devices.…”

Section: Introductionmentioning

confidence: 99%

Design of an Einzel Lens with Square Cross-Section

Krysztof

2021

Electronics

View full text Add to dashboard Cite

In this paper, the results of modeling and simulation of a microcolumn are presented. The microcolumn is part of a developed miniature MEMS electron microscope equipped with a miniature MEMS high-vacuum micropump. Such an arrangement makes this device the first stand-alone miniature electron-optical device to operate without an external high-vacuum chamber. Before such a device can be fabricated, research on particular elements must be carried out to determine the working principles of the device. The results of the calculations described in this article help us to understand the work of a microcolumn with square holes in the electrodes. The formation of an electron beam spot at the anode is discussed. Further calculations and results show the dependence of the Einzel lens size on the electron beam spot diameter, electron beam current, and microcolumn focusing voltage. The results are used to define the optimal design of the developed MEMS electron microscope.

show abstract

MEMS ion-sorption high vacuum pump

Cited by 24 publications

References 7 publications

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

Design of an Einzel Lens with Square Cross-Section

Contact Info

Product

Resources

About