MEMS Infrared Emitter and Detector for Capnography Applications

Chowdhury, M.F.; Hopper, Richard; Ali, Syed Zeeshan; Gardner, J. W.; Udrea, F.

doi:10.1016/j.proeng.2016.11.415

Cited by 14 publications

(12 citation statements)

References 2 publications

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“…End-tidal CO 2 (ET-CO 2 ) measurements are carried out in exhaled human breath during ventilation using capnography to find out the partial pressure of the CO 2 (for lung function analysis). [48,89] It is being used in the intensive care units, emergency care, and anaesthesiology for drug administration. Other applications such as oesophageal and endotracheal intubation to differentiate the oesophageal and tracheal track by sensing the ET-CO 2 .…”

Section: End-tidal Comentioning

confidence: 99%

“…Other applications such as oesophageal and endotracheal intubation to differentiate the oesophageal and tracheal track by sensing the ET-CO 2 . [47,48,89] NDIR-based gas sensors help in the non-invasive detection of ET-CO 2 quantitatively compared to other colorimetric sensors which can give a qualitative and semi-quantitative assessment. Different CO 2 sensors suitable for diagnosing ET-CO 2 are deliberated in the below section.…”

Section: End-tidal Comentioning

confidence: 99%

“…[45] Limitations of NDIR gas sensors are its detection limit in the range of ppm, which can be best suitable for CO 2 detection than other biomarkers. [46][47][48] This review discusses the current status of NDIR (Pyroelectric, thermopile, photodiode, and photoconductor), photoacoustic (LPAS and QEPAS) and TDLAS gas sensors available for detecting exhaled breath biomarkers considering the importance of real-time monitoring and rapid processing time of multiple data. Based on the maturity of different techniques, we discussed po-tential clinical applications and the frequency with which they can implement for clinical analysis.…”

Section: Introductionmentioning

confidence: 99%

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Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review

Ranu,

Rahman

et al. 2023

Advanced Sensor Research

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Exhaled breath analysis is considered an effective tool for diagnosing the patient's metabolic status because of its non‐invasive nature. Gas chromatography‐mass spectrometry (GC‐MS) and other mass spectrometry techniques are widely used for exhaled breath analysis. Nevertheless, the requirement of a handheld device for real‐time analysis and rapid processing time of multiple samples leads to advancing infrared (IR) based breath gas sensing techniques. Herein, the IR gas sensing technologies are discussed with a focus on non‐dispersive infrared (NDIR), photoacoustic (PAS), and tunable diode laser absorption spectroscopy (TDLAS) gas sensing technologies because of their highly selective gas detection among compound gases (mixture of VOCs), as well as their corresponding sensing mechanisms and characteristics, for real‐time monitoring of exhaled biomarkers. Carbon dioxide, acetone, ammonia, nitric oxide, methane, and ethylene are the significant biomarkers elaborated in this work with their respective clinical applications and the significance of non‐invasive real‐time monitoring using IR detectors. Challenges in selectivity and clinical trials leads to focus on this review. Current market analysis, present status of different techniques to detect specific biomarkers and other challenges with their possible solutions discussed in this review aid in developing highly selective IR‐based handheld breath VOC analyzers for early diagnosis and screening.

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Section: End-tidal Comentioning

confidence: 99%

Section: End-tidal Comentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review

Ranu,

Rahman

et al. 2023

Advanced Sensor Research

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“…Especially for MIR-LEDs, energy transitions of the semiconductor materials ≥ 6 µm remain a challenge, which is why to the best of our knowledge to date MIR-LEDs in the MIR range 6-20 µm have rarely been reported to date. Nevertheless, a sizeable number of gas measurements and sensors based on MEMS thermal emitters [92][93][94][95][96], plasmonic emitters [97,98] and MIR-LEDs [2,[99][100][101][102] have already been demonstrated and developed based on currently accessible emission wavelengths. Among these devices, non-dispersive IR (NDIR) CO 2 sensors are particularly common.…”

Section: Selected Applicationsmentioning

confidence: 99%

Advanced mid-infrared lightsources above and beyond lasers and their analytical utility

Hlavatsch

Mizaikoff

2022

ANAL. SCI.

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In the mid-infrared (MIR) spectral range, a series of applications have successfully been shown in the fields of sensing, security and defense, energy conservation, and communications. In particular, rapid and recent developments in MIR light sources have significantly increased the interest in developing MIR optical systems, sensors, and diagnostics especially for chem/bio detection schemes and molecular analytical application scenarios. In addition to the advancements in optoelectronic light sources, and especially quantum and interband cascade lasers (QCLs, ICLs) largely driving the increasing interest in the MIR regime, also thermal emitters and light emitting diodes (LEDs) offer opportunities to alternatively fill current gaps in spectral coverage specifically with analytical applications and chem/bio sensing/diagnostics in the focus. As MIR laser technology has been broadly covered in a variety of articles, the present review aims at summarizing recent developments in MIR non-laser light sources highlighting their analytical utility in the MIR wavelength range. Graphical abstract

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“…The advent of micro-electro-mechanical systems (MEMS) and micro-fabrication technology has enabled the construction of micro-hotplate devices with miniaturized dimensions and thermal mass, offering localized heating with minimal power consumption and rapid thermal response time. Initially spurred on DOI: 10.1002/smll.202303976 by the desire for low-power platforms within metal oxide gas sensors, [1][2][3] these devices have since been touted for use in applications ranging from IR sources within FTIR spectrometers or non-dispersive infra-red gas sensors [4][5][6][7][8] to heater stages for in situ electron microscopy materials characterization. [9,10] Typically, micro-hotplate structures consist of a meandering, electrically conductive element placed atop a SiN or SiO 2 dielectric layer, with the underlying material locally removed to form either a closed membrane or a freestanding element held up by supporting beams.…”

Section: Introductionmentioning

confidence: 99%

Polycrystalline Diamond Micro‐Hotplates

Thomas,

Stritt,

Mandal

et al. 2023

Small

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Micro‐hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra‐red sources within absorption‐based gas sensors to in situ heater stages for ultra‐high‐resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro‐migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron‐doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey‐body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp2 carbon are shown to be promising materials for the fabrication of next‐generation micro‐hotplates.

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MEMS Infrared Emitter and Detector for Capnography Applications

Cited by 14 publications

References 2 publications

Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review

Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review

Advanced mid-infrared lightsources above and beyond lasers and their analytical utility

Polycrystalline Diamond Micro‐Hotplates

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